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Publikováno v:
EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany ISBN: 9783540851547
The secondary electron (SE) emission flux in a high-resolution scanning electron microscope (HRSEM) is a powerful tool for delineation of electrically active dopant concentration, built-in potentials and surface electric fields in semiconductor junct
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::70b288f22e2521b0122ba4ff9adc385b
https://doi.org/10.1007/978-3-540-85156-1_320
https://doi.org/10.1007/978-3-540-85156-1_320