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pro vyhledávání: '"I. S. Pryalukin"'
Publikováno v:
Journal of Physics: Conference Series. 1588:012062
A mathematical model of low-pressure RF plasma flow taking into consideration electron temperature influence is presented. Results of calculations of carrier gas velocity, pressure and temperature as well as electron density and electron temperature
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f1a128bc3f99cacd9b3fd3c27b055ccb
https://doi.org/10.1088/1742-6596/1588/1/012062
https://doi.org/10.1088/1742-6596/1588/1/012062
