Zobrazeno 1 - 7
of 7
pro vyhledávání: '"I. S. Lagutin"'
Autor:
A. A. Lagutina, Igor V. Kochikov, I. S. Lagutin, Alexander V. Tikhonravov, Anatoly G. Yagola, Dmitry Lukyanenko, S.A. Sharapova
Publikováno v:
Moscow University Physics Bulletin. 75:578-584
The paper presents a theoretical study of the correlation of errors in the thickness of layers of multilayer optical coatings produced using monochromatic monitoring of the deposition process. Estimates of the degree of error correlation in layer thi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::869109d7378bc419f0e8bc3ffa65c984
https://doi.org/10.3103/s0027134920060193
https://doi.org/10.3103/s0027134920060193
Autor:
Tikhonravov, A. V., Lagutina, A. A., Lagutin, Iu. S., Lukyanenko, D. V., Sharapova, S. A., Sharov, A. N., Yagola, A. G.
Publikováno v:
Moscow University Physics Bulletin; Dec2023, Vol. 78 Issue 6, p783-789, 7p
Publikováno v:
Moscow University Physics Bulletin; Apr2023, Vol. 78 Issue 2, p135-144, 10p
Autor:
Lagutina, A. A.
Publikováno v:
Moscow University Physics Bulletin; Dec2022, Vol. 77 Issue 6, p818-824, 7p
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Nov2021, Vol. 39 Issue 6, p1-16, 16p
Autor:
Tikhonravov, A. V., Kochikov, I. V., Lagutina, A. A., Lagutin, I. S., Lukyanenko, D. V., Sharapova, S. A., Yagola, A. G.
Publikováno v:
Moscow University Physics Bulletin; Dec2020, Vol. 75 Issue 6, p578-584, 7p
Publikováno v:
Journal of Physics: Condensed Matter; 9/13/1999, Vol. 11 Issue 36, p1-1, 1p