Zobrazeno 1 - 2
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pro vyhledávání: '"I. M. Shapiev"'
Autor:
V. M. Kanevsky, A. V. Butashin, I. M. Shapiev, A. E. Muslimov, V. I. Mikhailov, E. G. Novoselova, I. S. Smirnov, A. M. Ismailov
Publikováno v:
Crystallography Reports. 60:561-564
The epitaxial growth of tellurium films by chemical vapor deposition is investigated. It is established that, under thermochemical activation conditions, tellurium films grow from vapor phase in the (10 \(\bar 1\)0) plane, parallel to the (001) musco
Publikováno v:
Technical Physics Letters. 41:83-85
We describe the technology of a thermoactivated process in the Te + H2 system, by which the dissociation of tellurium molecules in the gas phase is used to obtain structurally perfect epitaxial tellurium films. The epitaxial films were deposited onto