Zobrazeno 1 - 10
of 54
pro vyhledávání: '"I. Ghanashev"'
Autor:
K. Mizuno, K Yamauchi, Hirotaka Toyoda, I. Ghanashev, Hideo Sugai, Keiji Nakamura, M. Hosokawa
Publikováno v:
Plasma Sources Science and Technology. 10:378-385
Two different modes of electron heating are found in microwave discharges: the bulk heating mode characterized with low electron density ne and high electron temperature Te (~10 eV), and the surface heating mode with high ne and low Te (~3 eV). The c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::248f3ce70c846e7d1c0c16c0e21fc4fa
https://doi.org/10.1088/0963-0252/10/2/327
https://doi.org/10.1088/0963-0252/10/2/327
Autor:
Hideo Sugai, I. Ghanashev
Publikováno v:
Physics of Plasmas. 7:3051-3061
Electromagnetic surface waves excitation in cold overdense uniform planar plasma is modeled and numerically analyzed. The microwave is injected through a slot antenna cut in the wall of the metal vessel and the forced electromagnetic oscillation loca
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f310750808a9378f33c0f2ca1e152ab1
https://doi.org/10.1063/1.874158
https://doi.org/10.1063/1.874158
Publikováno v:
Journal of Physics D: Applied Physics. 33:1143-1149
The effect of slot antenna structures on plasma production was investigated in the large-area planar surface wave plasmas (SWPs) excited with 2.45 GHz microwave energy. Plasma production characteristics were measured for various types of slot antenna
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37a2f690d9ddd291395745a99e5fd0ba
https://doi.org/10.1088/0022-3727/33/10/302
https://doi.org/10.1088/0022-3727/33/10/302
Publikováno v:
Plasma Sources Science and Technology. 8:363-369
The paper presents space-resolved microwave intensity measurements in a surface-wave plasma device clearly demonstrating the existence of a local resonance in a resonance layer where the local electron plasma frequency is equal to the surface-wave fr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::91419fef4b3a826e5e6f0a455e23ce2f
https://doi.org/10.1088/0963-0252/8/3/304
https://doi.org/10.1088/0963-0252/8/3/304
Publikováno v:
Plasma Sources Science and Technology. 7:230-237
A planar cylindrical plasma has been produced using small slot antennas in an aluminum discharge chamber with a cylindrical section with a diameter of 22 cm. The 2.45 GHz microwave with a power of 0.2-2.0 kW was fed through a quartz window into the d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::70bef23c30cac58d04ab03ebbd208a2f
https://doi.org/10.1088/0963-0252/7/2/017
https://doi.org/10.1088/0963-0252/7/2/017
Publikováno v:
Plasma Sources Science and Technology. 7:192-205
Recent development of large-diameter (>30 cm) high-density microwave plasma production at low pressures (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6574c5e544c31cc28a530c5ac0c8f210
https://doi.org/10.1088/0963-0252/7/2/014
https://doi.org/10.1088/0963-0252/7/2/014
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:1537-1541
Plasma processing of large flat surfaces requires low pressure high density (ne=1011–1012 cm−3) plasmas with uniform plasma density distribution near to the processed surface. Microwave discharges may provide a valuable alternative to the inducti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::34a0c43c573a11f73f2c5f81c3ff429a
https://doi.org/10.1116/1.581183
https://doi.org/10.1116/1.581183
Autor:
Vasco Guerra, Ivan Zhelyazkov, Elena Tatarova, F M Dias, E. Stoykova, C M Ferreira, I. Ghanashev, J Loureiro
Publikováno v:
Journal of Physics D: Applied Physics. 30:2663-2676
A self-consistent kinetic model based on a set of coupled equations consisting of the local electron Boltzmann equation and the rate balance equations for the most important excited species (vibrationally and electronically excited molecular states)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6dec8c38e1fa5ed83bd58d261d95c9bd
https://doi.org/10.1088/0022-3727/30/19/003
https://doi.org/10.1088/0022-3727/30/19/003
Publikováno v:
Plasma Physics and Controlled Fusion. 39:A445-A458
Large-diameter high-density plasmas such as electron-cyclotron-resonance (ECR), helicon wave, inductively coupled, and surface-wave plasmas are currently being developed for plasma-assisted thin-film processes in the next generation. Actual applicati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e034850723db268ca4cddbb5323044f8
https://doi.org/10.1088/0741-3335/39/5a/042
https://doi.org/10.1088/0741-3335/39/5a/042
Publikováno v:
Journal of Electromagnetic Waves and Applications. 11:609-632
The influence of transversal density nonuniformity on the propagation of electromagnetic surface waves along plasma slabs and columns in the presence of collisions is analysed and illustrated by numerical evaluations for phase diagrams of axially hom
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::847c0e563498ea79f9c2fbfa4e9ff290
https://doi.org/10.1163/156939397x00864
https://doi.org/10.1163/156939397x00864