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Autor:
I. G. Sevrugin, E. G. Orlikova, A. A. Aushev, Yu. V. Tolokonnikova, V. G. Gogolev, V. M. Izgorodin, A. F. Kovylov, A. I. Vasil’eva
Publikováno v:
SPIE Proceedings.
The results of research of properties and preparation conditions of the plasmochemical SiO 2 films are submitted. These films coated various substrates (glass, metals, NaCl). Film deposition was carried out by decomposition of the tetraethoxycilane v
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3dfca6485e761d3cf2ad498a6d74a63f
https://doi.org/10.1117/12.537457
https://doi.org/10.1117/12.537457
