Zobrazeno 1 - 3
of 3
pro vyhledávání: '"I. E. Klemente"'
Autor:
A. E. Panich, A. V. Skrylev, I. E. Klemente, Konstantin V. Rudenko, Yu. N. Varzarev, Boris G. Konoplev, Z. E. Vakulov, E Yu Gusev, A. V. Miakonkikh, Oleg A. Ageev
Publikováno v:
Russian Microelectronics. 48:59-65
The influence of the duration of pulsed laser deposition on the properties of lithium niobate films is elucidated. An increase in the deposition time from 90 to 360 min is found to vary the LiNbO3 film thickness from (47.5 ± 3.8) to (197.9 ± 15.8)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::61230e6e4cd0a1dc8ab3753057c99692
https://doi.org/10.1134/s1063739719020094
https://doi.org/10.1134/s1063739719020094
Autor:
I. E. Klemente, V. Yu. Kireev, A. A. Dedkova, A. V. Myakon’kikh, N. A. Dyuzhev, Konstantin V. Rudenko
Publikováno v:
Nanotechnologies in Russia. 13:502-507
The effect of laser radiation with a wavelength of 970 nm and a power density of 0.29–2.10 W/cm2 on the process of atomic layer deposition of alumina films from precursors (trimethylaluminium + water vapor) is studied. Laser irradiation is performe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eed05ec0d1cdc3713434796f7f8ac3a5
https://doi.org/10.1134/s199507801805004x
https://doi.org/10.1134/s199507801805004x
Autor:
Z. E. Vakulov, Konstantin V. Rudenko, D. A. Golosov, A. P. Dostanko, E. G. Zamburg, S M Zavadskiy, Oleg A. Ageev, A. V. Miakonkikh, I. E. Klemente
Publikováno v:
Journal of Physics: Conference Series. 917:032024
This paper shows the results of studying the influence of target-substrate distance during pulsed laser deposition on electrical properties of LiNbO3 thin films. It has been shown that changing the target-substrate distance we can obtain thin films w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::29fa6aacfd863aaa7a51c8604c087a94
https://doi.org/10.1088/1742-6596/917/3/032024
https://doi.org/10.1088/1742-6596/917/3/032024