Zobrazeno 1 - 6
of 6
pro vyhledávání: '"I. E. Clemente"'
Publikováno v:
Russian Microelectronics. 50:230-238
The possibilities of the spectral ellipsometry method for precise measurements in the development and study of technological processes of atomic-layer deposition in microelectronics are investigated. The applicability of the method to thin dielectric
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fd6e13c505ca98f1435af5313c6b5e0
https://doi.org/10.1134/s1063739721040089
https://doi.org/10.1134/s1063739721040089
Autor:
I. E. Clemente, D. A. Golosov, Z. E. Vakulov, E. G. Zamburg, A. V. Miakonkikh, A. P. Dostanko, Konstantin V. Rudenko, S M Zavadskiy, Oleg A. Ageev
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 81:1476-1480
The results are presented from studying the effect substrate temperature has on the morphological, electrophysical, and optical parameters of LiNbO3 films obtained via pulsed laser deposition. It is established that films formed at temperatures of 30
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::33a562864185564c046a891a5631d886
https://doi.org/10.3103/s1062873817120309
https://doi.org/10.3103/s1062873817120309
Autor:
V. S. Klimin, I. E. Clemente, Oleg A. Ageev, Z. E. Vakulov, A. V. Miakonkikh, Konstantin V. Rudenko, E. G. Zamburg
Publikováno v:
Journal of Physics: Conference Series. 1410:012050
This paper shows the results of thermodynamic analysis of interfacial interaction in the lithium-niobium-oxygen system. The temperature dependences of the change in the Gibbs free energy calculated, taking into account the non-linear temperature depe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a18d15cfe070a6b33e637099a85b0e21
https://doi.org/10.1088/1742-6596/1410/1/012050
https://doi.org/10.1088/1742-6596/1410/1/012050
Publikováno v:
Journal of Physics: Conference Series. 1124:081038
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::309554db00fb7abb836d016b7ca08897
https://doi.org/10.1088/1742-6596/1124/8/081038
https://doi.org/10.1088/1742-6596/1124/8/081038
Autor:
D. A. Golosov, E. G. Zamburg, V. S. Klimin, Oleg A. Ageev, A. P. Dostanko, M.N. Ivonin, Konstantin V. Rudenko, D P Volik, Z. E. Vakulov, A. V. Miakonkikh, S M Zavadskiy, I. E. Clemente
Publikováno v:
Journal of Physics: Conference Series. 1124:022032
This paper shows the results of the study of size effects of electro-physical parameters in nanostructured LiNbO3 thin films fabricated by pulsed laser deposition. Obtained results shown that with an increase in the number of laser pulses from 50 000
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5caeab5ad6fd30b6b17582bc8d28223f
https://doi.org/10.1088/1742-6596/1124/2/022032
https://doi.org/10.1088/1742-6596/1124/2/022032
Autor:
Z Vakulov, M Ivonin, E G Zamburg, V S Klimin, D P Volik, D A Golosov, S M Zavadskiy, A P Dostanko, A V Miakonkikh, I E Clemente, K V Rudenko, O A Ageev
Publikováno v:
Journal of Physics: Conference Series; 2019, Vol. 1124 Issue 2, p1-1, 1p