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pro vyhledávání: '"I. Charkaborty"'
Autor:
I. Charkaborty, J. Z. Wilcox, Roman C. Gutierrez, Tony K. Tang, Wen J. Li, V. Vorperian, R. Bartman, William J. Kaiser, R. Calvet, C.B. Stell
Publikováno v:
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure