Zobrazeno 1 - 9
of 9
pro vyhledávání: '"I. A. Kas'kov"'
Autor:
N. N. Salashchenko, I. G. Zabrodin, A. K. Chernyshev, M. V. Zorina, I. V. Malyshev, Nikolay I. Chkhalo, M. S. Mikhailenko, A. E. Pestov, I. A. Kas’kov
Publikováno v:
Technical Physics. 65:1837-1845
Methods for high-precision processing of surface of optical elements using beams of accelerated ions are considered. Characteristics and parameters of the equipment and problems that can be solved are presented. It is shown that final correction of l
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e095900b37e356e5a99511ee98b89efd
https://doi.org/10.1134/s1063784220110274
https://doi.org/10.1134/s1063784220110274
Autor:
A. N. Nechay, Nikolay I. Chkhalo, I. G. Zabrodin, A. Ye. Pestov, N. N. Salashchenko, I. A. Kas’kov, A. A. Perekalov
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 13:862-869
A modular unit designed for the formation and study of cluster beams of inert and molecular gases is discussed. The results of the first experiments in studying the emission properties of cluster beams in the extreme ultraviolet range when excited by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4584809e1ce4447d4a02e4ca27a4dacb
https://doi.org/10.1134/s1027451019050094
https://doi.org/10.1134/s1027451019050094
Autor:
I. G. Zabrodin, A.E. Pestov, Nikolay I. Chkhalo, I. A. Kas’kov, D.I. Astakhov, Viacheslav Medvedev, L. A. Goncharov, A. K. Chernyshev, M. S. Mikhailenko, P.V. Krainov
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1010:165554
The paper describes a small-sized accelerated ion source developed on the basis of the KLAN-10M technological source. Record values of the ion current density ( j ≈ 95 mA/cm2) were obtained, which made it possible to use this source for problems of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0b3ab284691275bd89c2f48eab3fe64f
https://doi.org/10.1016/j.nima.2021.165554
https://doi.org/10.1016/j.nima.2021.165554
Autor:
Nikolay I. Chkhalo, A. Ya. Lopatin, Vladimir N. Polkovnikov, I. G. Zabrodin, S. E. Zuev, A. N. Nechay, M. V. Svechnikov, N. N. Salashchenko, S. A. Garakhin, I. A. Kas’kov, N. N. Tsybin
Publikováno v:
Quantum Electronics. 47:385-392
We describe a laboratory reflectometer developed at the IPM RAS for precision measurements of spectral and angular dependences of the reflection and transmission coefficients of optical elements in a wavelength range of 5–50 nm. The radiation is mo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::651a846d954b3fffe78227ae2a6f2c02
https://doi.org/10.1070/qel16300
https://doi.org/10.1070/qel16300
Autor:
I. V. Malyshev, N. N. Salashchenko, M. N. Toropov, A. E. Pestov, I. G. Zabrodin, Nikolay I. Chkhalo, Vladimir N. Polkovnikov, I. A. Kas’kov, M. S. Mikhaylenko
Publikováno v:
Precision Engineering. 48:338-346
The paper describes a high-performance facility for ion beam processing of the surface of optical elements. The facility is equipped with three technological ion sources, which allow working with inert or reactive gases, and a five-axis goniometer. T
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e988f0ad067ede27f02bd3db9048fa64
https://doi.org/10.1016/j.precisioneng.2017.01.004
https://doi.org/10.1016/j.precisioneng.2017.01.004
Autor:
N. N. Salashchenko, Nikolay I. Chkhalo, I. G. Zabrodin, Vladimir N. Polkovnikov, A. E. Pestov, A. N. Nechay, A. Ya. Lopatin, N. N. Tsybin, I. A. Kas’kov, I. V. Malyshev, S. Yu. Zuev, S. A. Garakhin, M. V. Svechnikov
Publikováno v:
Review of Scientific Instruments. 91:063103
A high-resolution laboratory reflectometer designed for operation in the soft x-ray (SXR) and extreme ultraviolet (EUV) ranges is described. High spectral resolution, up to 0.028 nm, in a wide spectral range is achieved due to the Czerny-Turner monoc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bdcab4aa07f4dcfbd1f0026824c07baf
https://doi.org/10.1063/1.5144489
https://doi.org/10.1063/1.5144489
Autor:
I. A. Kas’kov, M. N. Toropov, Nikolay I. Chkhalo, A. E. Pestov, Vladimir N. Polkovnikov, D. G. Volgunov, N. N. Salashchenko, S. Yu. Zuev, B. A. Zakalov, E. B. Kluenkov, I. G. Zabrodin, L. A. Suslov
Publikováno v:
Bulletin of the Russian Academy of Sciences: Physics. 75:49-52
An original stand for a nanolithographer-multiplicator with an operating wavelength of 13.5 nm and a design spatial resolution of 30 nm has been developed in Russia at the Institute for Physics of Microstructures, Russian Academy of Sciences. A detai
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8c4807e6585cd701376869c2b51ca0cd
https://doi.org/10.3103/s1062873811010278
https://doi.org/10.3103/s1062873811010278
Autor:
I. G. Zabrodin, Nikolay I. Chkhalo, N. N. Salashchenko, B. A. Zakalov, A. E. Pestov, I. A. Kas’kov
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 7:913-915
A device for the precise shape correction of optical surfaces of any irregular shape (convex, concave) up to 300 mm in diameter by means of ion-beam and reactive plasma etching is described. The possibilities of the device allow the fabrication of op
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::08bd55cfd5b922f840d77c7d258a7aad
https://doi.org/10.1134/s1027451013040216
https://doi.org/10.1134/s1027451013040216
Autor:
I. A. Kas’kov, L. A. Suslov, N. N. Salashchenko, I. G. Zabrodin, Vladimir N. Polkovnikov, E. B. Klyuenkov, S. D. Starikov, B. A. Zakalov
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 7:637-639
The paper describes a new apparatus for the magnetron and ion-beam synthesis of multilayer structures. The process parameters and operating conditions are presented, and the expected effects are discussed.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a29c3971fa9cb258d94131711f752c7
https://doi.org/10.1134/s1027451013040204
https://doi.org/10.1134/s1027451013040204