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Calculation of the distribution of film thickness on a rotating disk substrate in a sputtering system with long plate targets

Autor: O. D. Volpian, A I Kuzmichev, I M Drozd, Yu. A. Obod

Publikováno v: Journal of Physics: Conference Series. 872:012028

The results of calculation of the film thickness distribution of sputtered material deposited on a horizontal rotating disk substrate in a multi-cathode sputtering system with horizontal and inclined long plate targets are presented. The possibility

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::5e54f98c818d12cd55bda87464aae7fe
https://doi.org/10.1088/1742-6596/872/1/012028

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