Zobrazeno 1 - 2
of 2
pro vyhledávání: '"I F, Brunell"'
Publikováno v:
AIP Advances, Vol 5, Iss 1, Pp 017115-017115-7 (2015)
We report the photochemical atomic layer deposition of Al2O3 thin films and the use of this process to achieve area-selective film deposition. A shuttered vacuum ultraviolet (VUV) light source is used to excite molecular oxygen and trimethyl aluminum
Externí odkaz:
https://doaj.org/article/ead30dd1be3441aaa957de941aac84ef
Autor:
L, Hultman, S, Stafström, Z, Czigány, J, Neidhardt, N, Hellgren, I F, Brunell, K, Suenaga, C, Colliex
Publikováno v:
Physical review letters. 87(22)
We report a new fullerenelike material consisting of cross-linked nano-onions of C and N. Growth of the onion shells takes place atom by atom on a substrate surface and yields thin solid films during magnetron sputter deposition. Electron microscopy
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=pmid________::98c36db455b431c0053a0fe30f8de01f
https://pubmed.ncbi.nlm.nih.gov/11736407
https://pubmed.ncbi.nlm.nih.gov/11736407