Zobrazeno 1 - 10
of 39
pro vyhledávání: '"I C Noyan"'
Publikováno v:
New Journal of Physics, Vol 19, Iss 10, p 103001 (2017)
In this study, we present a numerical framework for modeling three-dimensional (3D) diffraction data in Bragg coherent diffraction imaging (Bragg CDI) experiments and evaluating the quality of obtained 3D complex-valued real-space images recovered by
Externí odkaz:
https://doaj.org/article/4da5c4cf6ff14a8b8ba2a7c3d33e3eb1
Publikováno v:
Experimental Mechanics. 62:1475-1488
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b7b05d17a27a3a0338a92661c9c4469
https://doi.org/10.1007/s11340-022-00896-w
https://doi.org/10.1007/s11340-022-00896-w
Publikováno v:
Journal of Applied Physics. 94:6040-6049
We used hard x-ray fluorescence and soft x-ray transmission microscopy to quantitatively measure “in situ” Cu/SiO2 interconnect dimensions down to 0.3 μm dimensions. We describe methods and analysis techniques for measuring submicron linewidths,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b6ad0fab7c54c2e083e5bc0cabbe2a70
https://doi.org/10.1063/1.1614430
https://doi.org/10.1063/1.1614430
Autor:
I. C. Noyan, C. C. Goldsmith
Publikováno v:
Advances in X-ray Analysis. 39:627-635
Residual stresses are a major factor in the reliable operation of multi-layer thin film structures. These stresses may form due to defect incorporation during deposition, recrystallization, second-phase precipitation, thermal coefficient of expansion
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e3e5b3a36ac3e8deae5f8eeb7da9f78
https://doi.org/10.1154/s0376030800023053
https://doi.org/10.1154/s0376030800023053
Publikováno v:
Advances in X-ray Analysis. 38:243-254
We have conducted in-situ, real-time x-ray diffraction experiments to probe the dynamic structural changes occurring in copper during loading and then on relaxation. The 331 KαI, KαII peaks were used to monitor the development of elastic strains du
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::293e9cb407d1c088d6d11b917244c95b
https://doi.org/10.1154/s0376030800017857
https://doi.org/10.1154/s0376030800017857
Publikováno v:
Applied Physics Letters. 78:820-822
We demonstrate the capability of fluorescence x-ray microscopy with a 0.25 μm beam for in situ measurements of Cu-wiring interconnects of submicron dimensions. We are able to measure submicron line widths, lengths, and thicknesses of both Cu and W s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::752cc53a2cba3c84e4f878f6e1d217e9
https://doi.org/10.1063/1.1339996
https://doi.org/10.1063/1.1339996
Autor:
I. C. Noyan, Linda S. Schadler
Publikováno v:
Advances in X-ray Analysis. 36:451-459
Deformation in polycrystalline materials is highly inhomogeneous on a micro scale. This inhomogeneity arises from the anisotropy of the constituent grains, coupled with local configurational parameters such as texture, gram size or proximity to a fre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0ba5257d74b98334a4eed677a3fc475
https://doi.org/10.1154/s0376030800019078
https://doi.org/10.1154/s0376030800019078
Autor:
Ian McNulty, I. C. Noyan, D. E. Eastman, Sean P. Frigo, Yuxin Wang, G. Xu, C. B. Stagarescu, Cornelia C. Retsch, X. Su, C.-K. Hu
Publikováno v:
Applied Physics Letters. 77:3465-3467
This letter describes quantitative nondestructive measurements of multilayer submicron Cu/SiO2 interconnect structures such as Cu lines, vias, and W lines with lateral dimensions down to 300 nm and electromigration defect structures using scanning tr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8d6b36a326ed232f5ad6dc3bb23d0284
https://doi.org/10.1063/1.1326489
https://doi.org/10.1063/1.1326489
Publikováno v:
Journal of Applied Physics. 82:4300-4302
The results of an x-ray diffraction study of dc-magnetron sputtered tungsten thin films are reported. It is shown that the phase transformation from the β to α W can cause multilayered single-phase films where the layers have very different stress
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c62d7c4fda9d5265204b7db051fece9a
https://doi.org/10.1063/1.366237
https://doi.org/10.1063/1.366237
Autor:
I. C. Noyan, Linda S. Schadler
Publikováno v:
Applied Physics Letters. 66:22-24
The stress transfer behavior in multilayer thin film structures (nickel/polyimide/copper) was measured using x‐ray stress analysis. Copper was deposited in various line lengths, and the stress/strain transferred from a loaded Ni substrate to the Cu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d059d14fabe22b9c37c09a0d1d907ada
https://doi.org/10.1063/1.114168
https://doi.org/10.1063/1.114168