Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Hyung Jae Shin"'
Publikováno v:
Sensors and Actuators A: Physical. 203:82-91
An indirectly clamped capacitive micromachined ultrasonic transducer (CMUT) with a high electromechanical coupling factor is reported. An indirectly clamped diaphragm includes a circular bottom plate hanging from a ring-type middle plate below the in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5113ea5c7c0e726e1c8fe6fbfd8e89b6
https://doi.org/10.1016/j.sna.2013.08.032
https://doi.org/10.1016/j.sna.2013.08.032
Publikováno v:
Sensors and Actuators A: Physical. 199:325-333
The performance and reliability issues of a new capacitive micro-machined ultrasonic transducer (CMUT) are presented in this paper. To enhance the moving efficiency, by obtaining a piston-like motion, an indirectly clamped membrane structure is propo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::25036a1eebc97cc642be313ccff87ec1
https://doi.org/10.1016/j.sna.2013.06.001
https://doi.org/10.1016/j.sna.2013.06.001
Publikováno v:
Thin Solid Films. :727-732
Perfluoropolymer (PP) thin films were deposited on aluminum (Al) and tetraethylorthosilicate (TEOS) oxide surfaces by thermal vapor-phase (VP) deposition to prevent the stiction of micro-mirrors during their touchdown operation on TEOS pads. The fluo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cfc58a86a2f847ed0ad637463556ef65
https://doi.org/10.1016/s0040-6090(00)01288-8
https://doi.org/10.1016/s0040-6090(00)01288-8
Publikováno v:
Surface and Coatings Technology. 112:48-51
The purpose of this study was to explore the deposition of low-energy organic films for the prevention of stiction in MEMS (micro electro mechanical systems). Perfluorinated thin films were deposited by the spin coating of fluorocarbon chemicals (FC)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::93cc5852975166b31d3c44dba7e3b217
https://doi.org/10.1016/s0257-8972(98)00806-8
https://doi.org/10.1016/s0257-8972(98)00806-8
Publikováno v:
Journal of Materials Science. 26:3486-3490
New indentation hardness measurements on silicon crystals are correlated with previous results obtained over a wide range of load values to analyse the ambient-temperature cracking behaviour. From an elastic-plastic-cracking analysis of the total res
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80043d73fe6686f2771b9e4f13e7314e
https://doi.org/10.1007/bf00557135
https://doi.org/10.1007/bf00557135
Publikováno v:
MRS Proceedings. 782
In this study, Adhesion force and Nanotribological Characteristics of fluorocarbon (FC) films on Al deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) were evaluated. The contact angle of FC thin films on Al was measured to be around 110
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b5a1adfed1fe4e1aadd9f604ac2e998c
https://doi.org/10.1557/proc-782-a5.55
https://doi.org/10.1557/proc-782-a5.55
Publikováno v:
1998 IEEE/LEOS Summer Topical Meeting. Digest. Broadband Optical Networks and Technologies: An Emerging Reality. Optical MEMS. Smart Pixels. Organic Optics and Optoelectronics (Cat. No.98TH8369).
We proposed a vertical spring as a mechanical element for effective use of device area in micromachines. The experiments over shadow evaporation process showed that the shape of trench-hole cross-section is the most important parameter for a flat spr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::930d5d9c1a211cfa2938f0e0a80df242
https://doi.org/10.1109/leosst.1998.689854
https://doi.org/10.1109/leosst.1998.689854
Autor:
Hyung Choi, Ji-Deog Kim, Hyung-jae Shin, Ja-nam Ku, Hong-Seok Lee, Il-Kwon Moon, Sukhan Lee, Jong-Hwa Won
Publikováno v:
Optomechatronic Systems III.
This paper presents the emergence of photonic crystals as significant optomechatronics components, following optical MEMS. It is predicted that, in the coming years, optical MEMS and photonic crystals may go through dynamic interactions leading to sy
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::28243e476b77ec98e8c04923ab04b03b
https://doi.org/10.1117/12.467722
https://doi.org/10.1117/12.467722
Publikováno v:
SPIE Proceedings.
Single layer of aluminum film was sputter deposited on to (100) oriented 4 inch silicon wafer to study effect of film thickness, D.C. power and sputtering gas pressure on the film stress. The as-deposited stress appeared to be increasing as film thic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f1ed740144547dc823e48aa7330efe4
https://doi.org/10.1117/12.448857
https://doi.org/10.1117/12.448857
Publikováno v:
SPIE Proceedings.
Micromachined cantilever structures are commonly used for measuring mechanical properties of thin film materials in MEMS. The application of conventional cantilever theory in experiment raises severe problem. The deformation of the supporting post an
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b3ced20df87ce74e2d64c55f2cc9d0a1
https://doi.org/10.1117/12.442949
https://doi.org/10.1117/12.442949