Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hyongsoo Kim"'
Autor:
Deok-Young Jung, Joo-Tae Moon, Mun-jun Kim, Jun-Won Lee, Kyung-Mun Byun, Seok-Woo Nam, Eunkee Hong, Hyongsoo Kim, Chilhee Chung, Seung-Heon Lee, Jung-Hoo Lee, Hyo-sug Lee, Mansug Gang
Publikováno v:
2010 IEEE International Interconnect Technology Conference.
A highly robust gap-fill process technology of spin-on glass (SOG) was developed for the interlayer dielectric (ILD) in sub-30nm devices. We revealed that the filling behavior of SOG within gaps during spin-coating is mainly dependent on the capillar
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8aab5e725b672c32d9534949a0790feb
https://doi.org/10.1109/iitc.2010.5510709
https://doi.org/10.1109/iitc.2010.5510709
Autor:
Kyung-Mun Byun, Deok-Young Jung, Jun-Won Lee, Seungheon Lee, Hyongsoo Kim, Mun-Jun Kim, Eunkee Hong, Mansug Gang, Seok-Woo Nam, Joo-Tae Moon, Chilhee Chung, Jung-Hoo Lee, Hyo-Sug Lee
Publikováno v:
Interconnect Technology Conference (IITC), 2010 International; 2010, p1-3, 3p