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pro vyhledávání: '"Hyeung-il Park"'
Autor:
Jang-Seop Kim, Jea-Gun Park, Hyung-Kook Park, Hyeung-il Park, Byeong-Sam Moon, Sanghyun Lee, Anselmo Jaehyeong Lee, Jeong-Hoon An
Publikováno v:
ECS Transactions. 75:103-107
Gettering techniques are the key features in recent semiconductor industry to develop the high performance devices. Above all, the intrinsic gettering is considered as the easiest way to achieve metal gettering effect in a silicon substrate with the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e0a5e2102ac407efb0dc9f82c98fa9e9
https://doi.org/10.1149/07504.0103ecst
https://doi.org/10.1149/07504.0103ecst
