Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Hye-Won Seok"'
Autor:
Soo Ouk Jang, Changhyun Cho, Ji Hun Kim, In Je Kang, Hyonu Chang, Hyunjae Park, Kyungmin Lee, Dae Gun Kim, Hye Won Seok
Publikováno v:
Ceramics, Vol 5, Iss 4, Pp 1174-1184 (2022)
To improve plasma and chemical resistance on various vacuum components used for semiconductor manufacturing equipment, various ceramic coating techniques have been applied. Among these methods for ceramic coating, the well-known atmospheric plasma sp
Externí odkaz:
https://doaj.org/article/bfd49fd3ecc84a52b653953d812e4e89
Publikováno v:
Journal of the Korean Institute of Electrical and Electronic Material Engineers. 27:815-819
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b83675d0e1c65ec1820fff1dcc0bf2f9
https://doi.org/10.4313/jkem.2014.27.12.815
https://doi.org/10.4313/jkem.2014.27.12.815
Publikováno v:
Journal of Sensor Science and Technology. 23:420-424
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a4daf095ba7604c362d4fce814606840
https://doi.org/10.5369/jsst.2014.23.6.420
https://doi.org/10.5369/jsst.2014.23.6.420
Publikováno v:
Journal of Sensor Science and Technology. 23:94-98
Aluminum nitride (AlN) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 25~75% N2 /Ar. The characterization of film properties were performed using surface profi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::931abfdaa9a1f955a22f681409b7fc3a
https://doi.org/10.5369/jsst.2014.23.2.94
https://doi.org/10.5369/jsst.2014.23.2.94
Publikováno v:
Journal of Nanoscience and Nanotechnology. 13:3341-3345
Transparent p-type semiconducting SrCu2O2 films have been deposited by RF magnetron sputtering under unbalanced bipolar pulsed DC bias on low-alkali glass substrates in a mixed gas of 1% H2/Ar below 400 degrees C. The pulsed DC bias voltages to subst
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::04332e9b2df0e78795ca063ec4c4ad57
https://doi.org/10.1166/jnn.2013.7305
https://doi.org/10.1166/jnn.2013.7305
Publikováno v:
Korean Journal of Materials Research. 22:86-90
Insoluble catalytic electrodes were fabricated by RF magnetron sputtering of Pt on Ti substrates and the performance of seawater electrolysis was compared in these electrodes to that is DSA electrodes. The Pt-sputtered insoluble catalytic electrodes
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75d270cd396ca77106e598a32bb5bab2
https://doi.org/10.3740/mrsk.2012.22.2.86
https://doi.org/10.3740/mrsk.2012.22.2.86
Publikováno v:
Ceramics International. 38:S623-S626
Transparent p–n heterojunction diodes based on oxide semiconductors were fabricated by RF magnetron sputtering on alkali-free glass substrates below 500 °C. 3% Al-doped ZnO (∼400 nm) was deposited as an n-type component, and SrCu 2 O 2 (∼290 n
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f814880a8a40e829d3a0deee6d192347
https://doi.org/10.1016/j.ceramint.2011.05.111
https://doi.org/10.1016/j.ceramint.2011.05.111