Zobrazeno 1 - 7 of 7 pro vyhledávání: '"Hye-Joon Ma"'
1
Measurement of Width and Step-Height of Photolithographic Product Patterns by Using Digital Holography
Autor: Ju Yeop Shin, Chung Ki Hong, Ik-Hwan Kwon, Sung Hoon Kang, Kyeong Suk Kim, Hyun-Chul Jung, Seung Pil Yang, Hye Joon Ma
Publikováno v: Journal of the Korean Society for Nondestructive Testing. 36:18-26
The semiconductor industry is one of the key industries of Korea, which has continued growing at a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::17934a2e6aceefadfca41d842aa962fa
https://doi.org/10.7779/jksnt.2016.36.1.18
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2
Damage Measurement for Molybdenum Thin Film Using Reflection-Type Digital Holography
Autor: Ik-Hwan Kwon, Kyeong-Suk Kim, Hye-Joon Ma, Chung Ki Hong, Hyun-Il Jung, Ju-Yeop Shin, Seung-Pill Yang, Hyun-Chul Jung
Publikováno v: Journal of the Korean Society for Nondestructive Testing. 35:141-149
In the fabrication of electronic circuits used in electronic products, molybdenum thin films are deposited on semiconductors to prevent oxidation. During the deposition, the presence of a particle or dust at the interface between the thin film and su
Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2f6ad40d3c665dd4dfc7a619ac7b8cfb
https://doi.org/10.7779/jksnt.2015.35.2.141
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