Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Hung-Tse Hsu"'
Autor:
Ching-Hsuan Huang, Han-Chun Tung, Yen-Wei Feng, Hung-Tse Hsu, Hsueh-Li Liu, Albert Lin, Peichen Yu
Publikováno v:
IEEE Access, Vol 12, Pp 165979-165991 (2024)
In semiconductor fabrication, any deviation leads to significant mistakes in the result. Thus, the proximity effect is a critical issue that must be solved. In the past, optical proximity correction was constructed by fabrication experience and physi
Externí odkaz:
https://doaj.org/article/11512097b2f3425bb13b53f7680b74dd
