Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Hun-Jung Yi"'
Autor:
Jin Young Lee, Dae-Woong Kim, Min Hur, Young-Hoon Song, Hun-Jung Yi, Chang-Sug Lee, Nu-Ri Kim, Woo Seok Kang
Publikováno v:
Canadian Journal of Physics. 101:43-52
We demonstrated the feasibility of die-level process monitoring using spatially resolvable optical emission spectrometers (SROESs) in a low-pressure plasma reactor. The spatially resolved Ar emission line intensities and their intensity ratios were o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b2ff5234489a369d6038f5e50c87905e
https://doi.org/10.1139/cjp-2020-0535
https://doi.org/10.1139/cjp-2020-0535
Publikováno v:
ECS Transactions. 13:331-340
As memory devices shrink, the introductions of new processes and materials have been prerequisite for high speed and reliability of semiconductors. Particularly, enlargement of processes using metal layers in fabricating devices led to many cleaning
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac9a3ae936cd5395439828d896f12f6c
https://doi.org/10.1149/1.2908646
https://doi.org/10.1149/1.2908646
Publikováno v:
Chemical Physics Letters. 327:325-333
The rate coefficients between the ground-state oxygen atom, O( 3 P), with CFClCXY (X,Y=H,F,Cl) have been determined by employing the chemiluminescence (CL) imaging technique coupled with the discharge-flow method. Concentration profiles of O( 3 P) in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::576cd45968e42b314493ad0769c72e44
https://doi.org/10.1016/s0009-2614(00)00879-4
https://doi.org/10.1016/s0009-2614(00)00879-4
Publikováno v:
Journal of Mass Spectrometry. 33:599-606
Ion-molecule reactions within ionized methane clusters were investigated utilizing electron ionization mass spectrometry. A number of ionic reaction products were observed and interpreted as series of cluster ions of the form (CH 4 ) n . X + where X
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f73bb5e43f2057e824873eac7fce73be
https://doi.org/10.1002/(sici)1096-9888(199807)33:7<599::aid-jms670>3.0.co
https://doi.org/10.1002/(sici)1096-9888(199807)33:7<599::aid-jms670>3.0.co
Publikováno v:
Review of Scientific Instruments. 81:103109
We proposed a spatially resolved optical emission spectrometer (SROES) for analyzing the uniformity of plasma density for semiconductor processes. To enhance the spatial resolution of the SROES, we constructed a SROES system using a series of lenses,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ed86ff70878197ea77e69ef080043c98
https://doi.org/10.1063/1.3488104
https://doi.org/10.1063/1.3488104
Autor:
Pil Kwon Jun, Da-Hee Lee, Jung Dae Park, Hun-jung Yi, Yang-koo Lee, Se-Yeon Kim, Seung-Ki Chae
Publikováno v:
Journal of The Electrochemical Society. 156:H172
Aqueous cleaning solutions were developed for postetch cleaning of tungsten layers to replace the amine-based organic strippers. They are composed of tetramethylammonium hydroxide, HF, and two additives. Even the cleaning recipes without a strong oxi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1102b98c42d45b595ca446ea57c2f6a4
https://doi.org/10.1149/1.3054443
https://doi.org/10.1149/1.3054443