Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hun Chow Lee"'
Autor:
Fei Li, Sa Zhao, Hun Chow Lee, Long Phan Nguyen, Qionghan Wang, Victor Lim, Tanya Yang, Fang Hong Gn, A. Inani, Tri Mardiyono
Publikováno v:
2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
With every new manufacturing node also come new modes of failures. Being able to identify these new fail modes and solve them quickly is the key to bring a manufacturing process to mass production readiness. Inline inspection is typically used for st
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc4609709fb4ec8628881db9b339d33f
https://doi.org/10.1109/asmc.2011.5898214
https://doi.org/10.1109/asmc.2011.5898214
Autor:
Tanya Yang, Hun Chow Lee, Lim, V., Gn, F.H., Mardiyono, T., Qionghan Wang, Long Phan Nguyen, Fei Li, Sa Zhao, Inani, A.
Publikováno v:
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI; 2011, p1-4, 4p