Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hou Ren Wu"'
Autor:
Errol Antonio C. Sanchez, S. F. Tzou, Yonah Cho, Yi Cheng Chen, Tony Fu, Chan Lon Yang, Wen S. Hsu, Chin Cheng Chien, Vincent C Chang, Chin I. Liao, Hou Ren Wu, Po Lun Cheng, Jinsong Tang
Publikováno v:
ECS Transactions. 3:245-248
A thin layer (15A) of Si seed was employed to help nucleate low temperature selective SiGe epitaxial film in recessed source and drain. In combination with pre-epi wet clean and low temperature chemical bake, use of Si seed resulted in improved SiGe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3abb14ca3135690195248a5a079a05bc
https://doi.org/10.1149/1.2355817
https://doi.org/10.1149/1.2355817
Autor:
Po Lun Cheng, Chin I Liao, Hou Ren Wu, Yi Cheng Chen, Chin Cheng Chien, Chan Lon Yang, S F Tzou, Jinsong Tang, Yonah Cho, Errol Sanchez, Vincent C Chang, Tony Fu
Publikováno v:
ECS Meeting Abstracts. :1423-1423
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4f99959996dab3d19255077243bef56d
https://doi.org/10.1149/ma2006-02/31/1423
https://doi.org/10.1149/ma2006-02/31/1423