Zobrazeno 1 - 10
of 34
pro vyhledávání: '"Hoogeland, D."'
Publikováno v:
In Applied Surface Science 2010 256(7):2081-2091
Autor:
Hoogeland, D., Jinesh, K. B., Roozeboom, F., Besling, W. F. A., van de Sanden, M. C. M., Kessels, W. M. M.
Publikováno v:
Journal of Applied Physics; Dec2009, Vol. 106 Issue 11, p114107-1-114107-7, 7p, 1 Black and White Photograph, 1 Chart, 6 Graphs
Autor:
Hoogeland, D., Jinesh, K.B., Voogt, F.C., Besling, W.F.A., Lamy, Y., Roozeboom, F., Sanden, van de, M.C.M., Kessels, W.M.M., Gendt, de, S.
Publikováno v:
Atomic layer deposition applications 5 : Proceedings of the 5th Symposium on Atomic Layer Deposition as part of the 216th Meeting of the Electrochemical Society 5-7 October 2009, Vienna, 389-397
STARTPAGE=389;ENDPAGE=397;TITLE=Atomic layer deposition applications 5 : Proceedings of the 5th Symposium on Atomic Layer Deposition as part of the 216th Meeting of the Electrochemical Society 5-7 October 2009, Vienna
STARTPAGE=389;ENDPAGE=397;TITLE=Atomic layer deposition applications 5 : Proceedings of the 5th Symposium on Atomic Layer Deposition as part of the 216th Meeting of the Electrochemical Society 5-7 October 2009, Vienna
In this paper we report on the overall plasma-assisted ALD processes of Al2O3 and TiN conducted in a single reactor chamber and at a single temperature (340 oC). The individual Al2O3 and TiN films in the stack were consecutively deposited in such a w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2d451fbd5c032f3665938f0ed26bb10a
https://doi.org/10.1149/1.3205073
https://doi.org/10.1149/1.3205073
Akademický článek
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Autor:
Shi, Yumeng1,2,3,4 (AUTHOR), Chen, Jiahui1,2,3,4 (AUTHOR), Cai, Lei1,2,3,4 (AUTHOR), Zhang, Xueling1,2,3,4 (AUTHOR), Chen, Zexu1,2,3,4 (AUTHOR), Yang, Jin1,2,3,4 (AUTHOR) jin_yang@fudan.edu.cn, Jiang, Yongxiang1,2,3,4 (AUTHOR) yongxiang_jiang@fudan.edu.cn, Lu, Yi1,2,3,4 (AUTHOR) luyi_eent@fudan.edu.cn
Publikováno v:
Advanced Science. 2/9/2024, Vol. 11 Issue 6, p1-15. 15p.
Publikováno v:
Bulletin of Materials Science. Sep2017, Vol. 40 Issue 5, p1035-1041. 7p.
Autor:
Shearer, Jeffrey C.1, Fisher, Mary J.1, Hoogeland, D.2, Fisher, Ellen R.1 Ellen.Fisher@colostate.edu
Publikováno v:
Applied Surface Science. Jan2010, Vol. 256 Issue 7, p2081-2091. 11p.
Autor:
Chakraborti, Parthasarathi, Sharma, Himani1 himani.sharma@gatech.edu, Pulugurtha, Markondeya1, Tummala, Rao1
Publikováno v:
Journal of Materials Science. Dec2015, Vol. 50 Issue 23, p7600-7609. 10p. 1 Color Photograph, 1 Black and White Photograph, 2 Diagrams, 2 Charts, 8 Graphs.
Autor:
Triggiani, Leonardo1,2,3 (AUTHOR), Muñoz-García, Ana Belén1 (AUTHOR), Agostiano, Angela2,3 (AUTHOR), Pavone, Michele1 (AUTHOR) michele.pavone@unina.it
Publikováno v:
Theoretical Chemistry Accounts: Theory, Computation, & Modeling. Oct2015, Vol. 134 Issue 10, p1-11. 11p.
Conference
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