Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Hongseon Song"'
Autor:
Seunghyup Lee, Younsoo Kim, Dokyoung Kim, Hongseon Song, Kijung Yong, Hyung-Suk Jung, Han-jin Lim
Publikováno v:
Thin Solid Films. 675:153-159
In this work, we have studied the atomic layer deposition (ALD) of ZrO2 under various O3 dosing conditions and systematically investigated the interfacial properties of ZrO2/TiN during ALD fabrication using the CpZr(N(CH3)2)3 and O3 reactant combinat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54df2f4866746178d078486888abdc86
https://doi.org/10.1016/j.tsf.2019.02.040
https://doi.org/10.1016/j.tsf.2019.02.040
Publikováno v:
Thin Solid Films. 713:138368
Atomic layer deposition with O3 reactant is widely used to deposit thin and conformal films in a ZrO2 based metal-insulator-metal (MIM) capacitor. Post-deposition annealing (PDA) improves the MIM capacitor's performances by crystallizing tetragonal Z
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::03c3d1d20eb4a86a0cbe65dc4be27379
https://doi.org/10.1016/j.tsf.2020.138368
https://doi.org/10.1016/j.tsf.2020.138368
Publikováno v:
Journal of The Electrochemical Society. 162:H713-H718
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c6caf1996942fb80795b41a2948c4ff
https://doi.org/10.1149/2.1111509jes
https://doi.org/10.1149/2.1111509jes
Publikováno v:
Nanoscale. 9(16)
In this work, an outer-to-inner strategy is demonstrated to simultaneously fabricate core–shell NPs and assemble them onto a scaffold. Specifically, the shell material is deposited onto the scaffold first, and then a layer of the core material (Au)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a7fd8c0fa83e9300f4d1ad9ac0f02e35
https://pubmed.ncbi.nlm.nih.gov/28401236
https://pubmed.ncbi.nlm.nih.gov/28401236