Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hon Lung Cheung"'
Autor:
Hon Lung Cheung, Wei Ma, Chen-Jung Tsai, Yick Chuen Chan, Francis Chee-Shuen Lee, Shoulung Chen, Ho-Yin Chan, Congshun Wang, Chun Cheong Wong
Publikováno v:
NEMS
The design, fabrication and characterization of an electrostatic-type bi-axial MEMS scanning mirror operating with inter-digitated comb fingers are presented. The effect of comb offset on device actuation is examined. In addition to standard designs
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::86e9fc19829e2102ea95a1d566971479
https://doi.org/10.1109/nems.2010.5592180
https://doi.org/10.1109/nems.2010.5592180
Autor:
Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, Lee, F.C.S., Chen-Jung Tsai
Publikováno v:
2010 5th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (NEMS); 2010, p186-190, 5p