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Publikováno v:
Energy Procedia. :310-319
The present work demonstrates the suitability of spectral ellipsometry (SE) to properly characterize ultra-thin (< 15nm) hydrogenated microcrystalline silicon (μc-Si:H) and its possible advantages over alternative methods, e.g. Raman spectroscopy. F
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https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9eaf3c9de8ec0e3aa91740039f1e92c5
