Zobrazeno 1 - 10
of 28
pro vyhledávání: '"Holger Lüthje"'
Publikováno v:
Microsystem Technologies. 14:1949-1954
An important aspect of the development of electromagnetic microactuators is the search for suitable materials as well as the development of the respective deposition and patterning processes. Within the Collaborative Research Center 516 “Design and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66313633b835998d3b81d5e4d10005d9
https://doi.org/10.1007/s00542-008-0626-z
https://doi.org/10.1007/s00542-008-0626-z
Publikováno v:
Thin Solid Films. 515:8028-8033
We report a large piezoresistive effect of the plasma assisted chemical vapor deposited hydrogenated amorphous carbon (a-C:H) films deposited at bias voltages of − 350 and − 800 V. The gauge factors were measured in transversal, longitudinal stra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a6d118d13a03e0234171956050c1cb2c
https://doi.org/10.1016/j.tsf.2007.03.046
https://doi.org/10.1016/j.tsf.2007.03.046
Publikováno v:
Journal of Micromechanics and Microengineering. 17:S83-S90
Sputter-deposited amorphous diamond-like carbon (DLC, a-C) on silicon has been investigated with respect to micro electro mechanical systems (MEMS) applications. Sputtered a-C with a content of diamond-like sp3 bonded carbon of around 25% showed a hi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::34f850639876f396182f897123532250
https://doi.org/10.1088/0960-1317/17/7/s04
https://doi.org/10.1088/0960-1317/17/7/s04
Publikováno v:
Journal of Micromechanics and Microengineering. 17:S77-S82
Diamond-like carbon (DLC) film was deposited using plasma-assisted chemical vapour deposition (PACVD) at -350 V and -800 V. DLC strain gauges were integrated in bulk micromachined silicon. Optical bandgaps were found to be 1.2 eV and 1.03 eV at -350
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0860cec54419ba0dc6bc82eb8f388591
https://doi.org/10.1088/0960-1317/17/7/s03
https://doi.org/10.1088/0960-1317/17/7/s03
Publikováno v:
Plasma Processes and Polymers. 4:S129-S133
For different applications like thin film sensors or microactuators soft and hard magnetic films are required to create and guide the magnetic flux. In many cases, the required thickness of the coatings is well above 10 µm. For the preparation of co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::550a1714b0feb89a60f09d661a75c0f2
https://doi.org/10.1002/ppap.200730504
https://doi.org/10.1002/ppap.200730504
Publikováno v:
Vakuum in Forschung und Praxis. 18:25-29
Die Herstellung intelligenter Oberflachen nach dem Vorbild der Natur ist ein wichtiges Forschungsthema der nahen Zukunft. Bereits heute gibt es Beispiele fur Beschichtungen, die in der Lage sind, entweder intrinsisch oder von ausen gezielt gesteuert
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d8ad3328a253207516f8c5893e45cb47
https://doi.org/10.1002/vipr.200600307
https://doi.org/10.1002/vipr.200600307
Publikováno v:
Thin Solid Films. 515:1171-1175
Amorphous diamond-like carbon films are well known for their excellent tribological properties. In this paper, we will discuss the sensoric properties of multifunctional a-C:H films with respect to force/load/pressure and temperature measurement. It
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e4ff8afb2548af272b781980b4305f8a
https://doi.org/10.1016/j.tsf.2006.07.143
https://doi.org/10.1016/j.tsf.2006.07.143
Publikováno v:
Sensors and Actuators A: Physical. :75-82
In this contribution we report for the first time on the successful integration of amorphous carbon (a-C) as a piezoresistive strain gauge into a silicon micro cantilever force sensor. Sputter-deposited a-C layers showing excellent tribological prope
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2230a75bcf26206f4bbf9c86b805b129
https://doi.org/10.1016/j.sna.2005.11.059
https://doi.org/10.1016/j.sna.2005.11.059
Autor:
R. Küster, Ralf Bandorf, Günter Bräuer, J.-H. Sick, Stephanus Büttgenbach, C. Henke, C. Neumeister, Holger Lüthje, Hans H. Gatzen, A. Phataralaoha
Publikováno v:
Microsystem Technologies. 12:680-684
In this work the possibilities for the reduction of friction and wear in micro electro-mechanical systems (MEMS) are investigated. An improvement of the tribological behaviour of microsystems can be realized by optimizing the contact condition and by
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cd13337c42cd1c97b52d8a570aff734d
https://doi.org/10.1007/s00542-006-0090-6
https://doi.org/10.1007/s00542-006-0090-6
Publikováno v:
Surface and Coatings Technology. :530-533
Fluid lubrication can hardly be realized for microparts and MEMS components. Therefore, coatings with low friction will be applied. Due to the small size of these parts, only nanofilms are applicable. For further improvement of the microtribological
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::df031cdae8d929555120a7b1cadf4ccc
https://doi.org/10.1016/j.surfcoat.2004.07.010
https://doi.org/10.1016/j.surfcoat.2004.07.010