Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hodaka Otsuka"'
Publikováno v:
Sensors, Vol 23, Iss 23, p 9557 (2023)
Microelectromechanical systems (MEMS)-based capacitive pressure sensors are conventionally fabricated from diaphragms made of Si, which has a high elastic modulus that limits the control of internal stress and constrains size reduction and low-pressu
Externí odkaz:
https://doaj.org/article/4815d8046a464ac8a651b2ce183db518
Autor:
Otsuka, Hodaka1 (AUTHOR) otsuka.hodaka.m1@s.mail.nagoya-u.ac.jp, Ninoseki, Takafumi1 (AUTHOR), Oka, Chiemi1 (AUTHOR), Hata, Seiichi1 (AUTHOR), Sakurai, Junpei1 (AUTHOR) junpei.sakurai@mae.nagoya-u.ac.jp
Publikováno v:
Sensors (14248220). Dec2023, Vol. 23 Issue 23, p9557. 12p.