Zobrazeno 1 - 10
of 42
pro vyhledávání: '"Hoang Manh Chu"'
Publikováno v:
Photonics, Vol 11, Iss 9, p 842 (2024)
In this study, we propose a mechanism for tuning the modal characteristics of a wedge plasmonic waveguide. The wedge plasmonic waveguide is composed of a thin metallic layer deposited on a wedge-shaped dielectric waveguide. The tuning mechanism is ba
Externí odkaz:
https://doaj.org/article/f567e8791891460a9b93c9f01197f719
Publikováno v:
Archive of Mechanical Engineering, Vol vol. 69, Iss No 4, Pp 629-643 (2022)
In this paper, a spring system symmetrically arranged around a circular plate compliant to out-of-plane oscillation is proposed. The spring system consists of single serpentine springs mutually coupled in a plane. Three theoretical mechanical models
Externí odkaz:
https://doaj.org/article/1896f5194c0f498aaeb5bb1ca77d7664
Publikováno v:
Micromachines, Vol 8, Iss 2, p 42 (2017)
This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, t
Externí odkaz:
https://doaj.org/article/42ccf481b5c24163beec9060a55f5122
Publikováno v:
Journal of Mechanical Engineering and Sciences; Vol 13 No 3 (2019): (September 2019); 5334-5346
In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are complia
Publikováno v:
Plasmonics. 14:1751-1763
Exploring hybrid gap surface plasmon polariton waveguides (HGSPPWs) is an important milestone in developing the next-generation, nanoscale integrated photonic circuit technology. To advance their potential applications, HGSPPWs are required to have t
Publikováno v:
Microsystem Technologies. 24:2159-2168
We present wafer-level vacuum package of two-dimensional (2-D) micro-scanner based on glass-silicon anodic bonding. To form the sacrificial gap for evacuating air in the package cavity before hermetically sealed, the reflow process of Au/Sn/Cr posts
Publikováno v:
Journal of Nanoscience and Nanotechnology. 17:1525-1529
We report a top-down method for fabricating ultra-high aspect ratio single-crystal silicon nanowires. The fabrication method is based on the standard photolithography technique and anisotropic wet etching of the single-crystal silicon in KOH solution
Autor:
Hoang Manh Chu
Publikováno v:
Vacuum. 126:45-50
Researches on energy dissipation of micro- and nano-mechanical beam resonators into the surrounding air are classified into two models, air drag force damping of the resonant beam vibrating in free space and squeeze film air damping of the resonant b
Publikováno v:
Materials Letters. 152:94-97
In this paper, we present a top–down fabrication method of single-crystal silicon nanowires. The method employs the popular photolithography technique and etching-rate dependent on the crystal orientation of single-crystal silicon in KOH solution.
Publikováno v:
International Journal of Precision Engineering and Manufacturing. 15:695-701
In this paper, we present a highly effective vacuum seal method, which is based on anodic bonding assisted by the reflow of lowmelting temperature metal. To form sacrificial gap for evacuating the packaged cavity before hermetically sealing, the refl