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Autor:
Anthony Cheng, Meng C. Li, P. T. Chu, C. K. Fang, Ho Ku Lan, H. C. Shiao, Grace H. Ho, I-Chung Chang, H. L. Yeh, C. Y. Huang, Chung-Jen Chen, K. Y. Shu, Y. C. Chu
Publikováno v:
SPIE Proceedings.
The lens heating (LH) induced focus drift of the ASML i-line Step & Scan was measured at five NA/Sigma settings: three ASML default and two TSMC production settings. The new LH scaling constants at three ASML settings, when multiplied by a dose-match
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea6133085d6cb07f779e180e0b2c194f
https://doi.org/10.1117/12.436722
https://doi.org/10.1117/12.436722
