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Autor:
Hja Schuurmans, Pcn Crouzen, JJ Beulens, CJ Timmermans, Gmw Gerrit Kroesen, Jan Werner, CB Beijer, H Vasmel, DC Daan Schram
Publikováno v:
Journal of Applied Polymer Science. 46:527-540
In the plasma polymn. of PhMe using an Ar plasma, the sp. power flux to the substrate is proportional to arc power and Ar flow rate and is independent of PhMe flow rate. Heat transfer to the substrate increases with arc power and Ar flow rate in the