Zobrazeno 1 - 10
of 32
pro vyhledávání: '"Hitoshi Tsuyama"'
Autor:
Norikazu Hashimoto, Hitoshi Tsuyama
Publikováno v:
Journal of the Mass Spectrometry Society of Japan. 25:351-362
Experimental study on the analysis of phosphorus and arsenic in silicon has beencarried out with Hitachi IMA-2type ion microanalyzer. It was found that the interfere of 30SiH+ and 29Si30SiO+ peaks were important problem for the analysis. The anal yti
Publikováno v:
International Journal of Mass Spectrometry and Ion Physics. 27:63-76
A high-resolution secondary ion mass spectrometer (SIMS) was constructed for solid surface analyses. The instrument is composed of a Hitachi IMA-2 ion probe and a stigmatic, second-order, double focusing mass spectrometer. Commercially available sili
Publikováno v:
Journal of the Mass Spectrometry Society of Japan. 25:251-262
Experimental studies of solid surface analyses are carried out by means of low energy ion scattering spectroscopy(ISS)and secondary ion mass spectroscopy(SIMS) . The instrument is composed of a HITACHI IMA-2 ion probe and a stigmatic second-order dou
Autor:
Hitoshi Tsuyama, Norikazu Hashimoto
Publikováno v:
Journal of the Mass Spectrometry Society of Japan. 25:363-370
Phosphorus and arsenic profiles in polycrystalline Si-SiO2-Si structures were studied by ion microanalyzer, sup Pressed of edge effects by electronic gating. The Pand As diffused in the poly-Si layer were very uniform and had atendency of pile-up at
Publikováno v:
Nuclear Instruments and Methods. 152:407-414
Ion optical properties of an electrostatic hexapole lens are described. The correction methods for second-order image aberrations of double-focusing mass spectrometers are also examined. As an experimental example, the second-order image aberration o
Publikováno v:
Review of Scientific Instruments. 47:1288-1292
A display device for ion beam profiles which permits the study of mass spectrometer ion source performance is presented. In this device the ion beam from the source is deflected by two pairs of plate electrodes, and a small portion of the beam’s cr
Publikováno v:
International Journal of Mass Spectrometry and Ion Physics. 26:77-90
A double-focusing mass spectrometer of second order was constructed and the focusing property was examined. The ion optical system was determined by computer calculations in order to correct all second-order image aberrations. In the calculations the
Publikováno v:
Journal of the Mass Spectrometry Society of Japan. 15:82-94
Publikováno v:
Journal of the Mass Spectrometry Society of Japan. 1959:56-60
In this paper a new design of a simple ion source of mass spectrometer for solid material, and the techniques as well as the results of the experiments on the isotopic analysis of lead are introduced. The instrument is the Hitachi mass spectrometer,
Publikováno v:
SHINKU. 17:181-185
An electrostatic hexapole lens is used for the study to correct the image curvature resulting from second order aberration in a mass spectrometer. The mass spectrometer used is a Hitachi RMU-6D double focusing type especially attached a photographic