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pro vyhledávání: '"Hitoshi Iwadate"'
Autor:
Manca Logar, James F. Mack, Hitoshi Iwadate, Yonas T. Yemane, Philip B. Van Stockum, Fritz B. Prinz
Publikováno v:
Chemistry of Materials. 24:4357-4362
We present in situ topographical observations of film growth during the initial cycles of atomic layer deposition (ALD) using scanning tunneling microscopy (STM). We present cycle-by-cycle STM topographs of zinc sulfide films during ALD on Au(111) su
Publikováno v:
Review of Scientific Instruments. 82:123704
We have built a combined scanning tunneling microscope-atomic layer deposition (STM-ALD) tool that performs in situ imaging of deposition. It operates from room temperature up to 200 °C, and at pressures from 1 × 10(-6) Torr to 1 × 10(-2) Torr. Th