Zobrazeno 1 - 10
of 41
pro vyhledávání: '"Hitoshi Akimichi"'
Autor:
Hitoshi Akimichi
Publikováno v:
Journal of the Vacuum Society of Japan. 56:220-226
Publikováno v:
Measurement. 45:2452-2455
A new leak element, which is named as “standard conductance element (SCE)”, has been developed for in situ calibration of ionization gauges (IGs) and quadrupole mass spectrometers (QMSs). The SCE is made of a stainless-steel sintered filter with
Publikováno v:
Measurement. 45:2441-2444
At the calibration of standard leaks by a comparison method with reference standard leaks, important factors to evaluate the flow rates are the degrees of stability of a mass spectrometer leak detector (MSLD) and standard leaks. Stability of two leak
Publikováno v:
Vacuum. 86:838-842
A new leak element using a sintered stainless steel filter with a pore size of less than 1 μm has been developed for in-situ calibrations of ionization gauges (IGs) and quadruple mass spectrometers (QMSs). The gas flow through this leak element real
Publikováno v:
Journal of the Vacuum Society of Japan. 55:226-232
Publikováno v:
Vacuum. 86:226-231
A new two-stage flow-dividing system has been developed for the calibration of ultrahigh vacuum gauges from 10−9 Pa to 10−5 Pa for N2, Ar, and H2. This system is designed based on the techniques for our previously developed calibration system in
Publikováno v:
Journal of the Vacuum Society of Japan. 54:298-306
Publikováno v:
Vacuum. 85:78-83
Stability tests of two quadrupole mass spectrometers (QMSs) were performed using a two-stage flow-dividing system from the following viewpoints: (1) fluctuation and drift of ion current, (2) repeatability of ion current, (3) change in ion current owi
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 28:937-941
The effect of surface material and roughness on the conductance of a channel at molecular flow was measured for N2, Ar, He, and H2. The experimental results were compared with the results of Monte Carlo calculations. The channel consisted of two para
Publikováno v:
Journal of the Vacuum Society of Japan. 53:614-620
A constant pressure type flowmeter was developed to generate precise gas flow for calibrations of vacuum gauges by an orifice flow method and standard leaks by a comparison method. The flow rate is derived from the constant pressure and the volume re