Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Hisashi Genjima"'
Autor:
Seiji Nagahara, Arnaud Dauendorffer, Arame Thiam, Xiang Liu, Yuhei Kuwahara, Cong Que Dinh, Soichiro Okada, Shinichiro Kawakami, Hisashi Genjima, Noriaki Nagamine, Makoto Muramatsu, Satoru Shimura, Atsushi Tsuboi, Kathleen Nafus, Yannick Feurprier, Marc Demand, Rajesh Ramaneti, Philippe Foubert, Danilo De Simone, Geert Vandenberphe
Publikováno v:
Advances in Patterning Materials and Processes XL.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8dce95de5c3a24f338709fe4152387fd
https://doi.org/10.1117/12.2657432
https://doi.org/10.1117/12.2657432
Autor:
Seiji Nagahara, Arnaud Dauendorffer, Xiang Liu, Tomoya Onitsuka, Hisashi Genjima, Noriaki Nagamine, Yuhei Kuwahara, Yuya Kamei, Shinichiro Kawakami, Makoto Muramatsu, Satoru Shimura, Kathleen Nafus, Noriaki Oikawa, Yannick Feurprier, Marc Demand, Sophie Thibaut, Alexandra Krawicz, Steven Grzeskowiak, Katie Lutker-Lee, Eric Liu, Christopher Catano, Joshua D. LaRose, Jeffrery C. Shearer, Lior Huli, Philippe Foubert, Danilo De Simone
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2022.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::45726dd0148c7dbb78756f0430b9d1a4
https://doi.org/10.1117/12.2642941
https://doi.org/10.1117/12.2642941
Autor:
Hiroki Tadatomo, Arnaud Dauendorffer, Tomoya Onitsuka, Hisashi Genjima, Yasuyuki Ido, Soichiro Okada, Yuhei Kuwahara, Arisa Hara, Congque Dinh, Seiji Fujimoto, Shinichiro Kawakami, Makoto Muramatsu, Satoru Shimura, Kathleen Nafus, Noriaki Oikawa, Kenta Ono, Yannick Feurprier, Marc Demand, Ainhoa R. Negreira, Seiji Nagahara, Blanco Victor, Philippe Foubert, Danilo De Simone
Publikováno v:
Advanced Etch Technology and Process Integration for Nanopatterning XI.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::46075dbd61a942dc98bbd090620bacf0
https://doi.org/10.1117/12.2614012
https://doi.org/10.1117/12.2614012
Autor:
Nagahara, Seiji, Dauendorffer, Arnaud, Thiam, Arame, Liu, Xiang, Kuwahara, Yuhei, Dinh, Cong Que, Okada, Soichiro, Kawakami, Shinichiro, Genjima, Hisashi, Nagamine, Noriaki, Muramatsu, Makoto, Shimura, Satoru, Tsuboi, Atsushi, Nafus, Kathleen, Feurprier, Yannick, Demand, Marc, Ramaneti, Rajesh, Foubert, Philippe, De Simone, Danilo, Vendenberghe, Geert
Publikováno v:
Proceedings of SPIE; 4/11/2023, Vol. 12498, p124981G-124981G-10, 1p
Autor:
Kohyama, T., Chang, Shu-Hao, Doise, Jan, Kocsis, Michael, De Schepper, Peter, Foubert, Philippe
Publikováno v:
Proceedings of SPIE; 4/11/2023, Vol. 12498, p124980A-124980A-6, 1p