Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Hiroshi Irihama"'
Publikováno v:
Key Engineering Materials. :1067-1072
Evaluation method of nano-scale internal cracks by ultrasonic atomic force microscopy (UAFM) is proposed based on two approaches. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09a31503281fc66513163711c0903739
https://doi.org/10.4028/www.scientific.net/kem.261-263.1067
https://doi.org/10.4028/www.scientific.net/kem.261-263.1067
Publikováno v:
Surface Science. :1145-1151
Ultrasonic atomic force microscopy (UAFM) is a new scientific tool for reliable measurement of nano-scale elasticity based on the resonance frequency measurement of AFM cantilever in the contact mode. This paper proposes Q -control for improving reso
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::31fe3bcae38a20d7da0e7d84bfa73de0
https://doi.org/10.1016/s0039-6028(03)00410-2
https://doi.org/10.1016/s0039-6028(03)00410-2
Publikováno v:
Japanese Journal of Applied Physics. 41:832-835
We found a new type of dislocation motion in highly oriented pyrolytic graphite during subsurface observation by ultrasonic atomic force microscopy. As a load was applied by the tip, apparent edge-type dislocations (Frank partial dislocations) moved
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a9a69d71dcbcc63c4b4fb6351285b35e
https://doi.org/10.1143/jjap.41.832
https://doi.org/10.1143/jjap.41.832
Publikováno v:
JSME International Journal Series A. 45:561-566
We verify that ultrasonic atomic force microscopy (UAFM) can detect and evaluate subsurface objects with a resolution of around 10nm. We first show that the resonance frequency of UAFM cantilever shows a measurable change due to subsurface low-elasti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::62bcbec70611d6f280f980ce27ce8066
https://doi.org/10.1299/jsmea.45.561
https://doi.org/10.1299/jsmea.45.561
Autor:
Kenta Suzuki, Hiroshi Irihama, Tomoyuki Matsuyama, Daiyu Fujii, Taro Ogata, Yukio Koizumi, Hisashi Nishinaga, Hajime Yamamoto, Yohei Fujishima, Toru Hirayama, Ryoichi Kawaguchi
Publikováno v:
SPIE Proceedings.
For future printing based on multiple patterning and directed self-assembly, critical dimension and overlay requirements become tighter for immersion lithography. Thermal impact of exposure to both the projection lens and reticle expansion becomes th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0c3048c2562a8e63a56df4754b551dc0
https://doi.org/10.1117/12.2046640
https://doi.org/10.1117/12.2046640
Publikováno v:
Proceedings of the Asian Pacific Conference on Fracture and Strength and International Conference on Advanced Technology in Experimental Mechanics. :232-235
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dfc10d615f3484d63fd9e98226aa4ea7
https://doi.org/10.1299/jsmeatemapcfs.1.01.203.0_232
https://doi.org/10.1299/jsmeatemapcfs.1.01.203.0_232
Publikováno v:
SPIE Proceedings.
IC manufacture has to meet stringent requirements pushing the imaging tools beyond their limits. The key performance attribute of the imaging tool is the quality of the image projected on wafer plane. The image quality is controlled by the wavefront
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b85ad03609c6d67da7fd47a7091bac0e
https://doi.org/10.1117/12.656651
https://doi.org/10.1117/12.656651
Publikováno v:
SPIE Proceedings.
Two evaluation methods of nano-scale internal defects by ultrasonic atomic force microscopy (UAFM) is reviewed. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis of a model includin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::745b13adc98effbf2b8f4f898e142c21
https://doi.org/10.1117/12.483823
https://doi.org/10.1117/12.483823
Publikováno v:
SPIE Proceedings.
Ultrasonic atomic force microscopy (UAFM) is a new scientific tool realizing reliable measurement of nano-scale elasticity from resonance vibration of cantilever in the contact mode AFM. The elasticity is evaluated from the resonance frequency, and t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b1dd60a76e3f77df5fd738c1d10ff717
https://doi.org/10.1117/12.469611
https://doi.org/10.1117/12.469611
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p1659-1669, 11p