Výsledky vyhledávání - "Hiroshi Fukuda, Hiroshi Fukuda"

Periodical

Phase Retrieval from Defocused Images and Its Applications in Lithography

Autor: von Bunau, Rudolf M., Hiroshi Fukuda, Hiroshi Fukuda, Tsuneo Terasawa, Tsuneo Terasawa

Publikováno v: Japanese Journal of Applied Physics; December 1997, Vol. 36 Issue: 12 p7494-7494, 1p

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Periodical

Imaging Characteristics of Multi-Phase-Shifting and Halftone Phase-Shifting Masks

Autor: Terasawa, Tsuneo, Hasegawa, Norio, Hiroshi Fukuda, Hiroshi Fukuda, Souichi Katagiri, Souichi Katagiri

Publikováno v: Japanese Journal of Applied Physics; November 1991, Vol. 30 Issue: 11 p2991-2991, 1p

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Periodical

Axial Image Superposing (Super-FLEX) Effect Using the Mask Modulation Method for Optical Lithography

Autor: Hiroshi Fukuda, Hiroshi Fukuda

Publikováno v: Japanese Journal of Applied Physics; November 1991, Vol. 30 Issue: 11 p3037-3037, 1p

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Periodical

Direct Patterning of Spin-on-Glass Materials by ArF Excimer Laser Irradiation and Their New Application to Hard-mask Processes

Autor: Taku Morisawa, Taku Morisawa, Hiroshi Fukuda, Hiroshi Fukuda

Publikováno v: Japanese Journal of Applied Physics; December 1996, Vol. 35 Issue: 12 p6366-6366, 1p

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Printing Isolated Features with k1= 0.2 Using Multiple-Pupil Exposure

Autor: Rudolf M. von Bünau, Rudolf M. von Bünau, Hiroshi Fukuda, Hiroshi Fukuda

Publikováno v: Japanese Journal of Applied Physics; December 1996, Vol. 35 Issue: 12 p6400-6400, 1p

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Periodical

A New Pupil Filter for Annular Illumination in Optical Lithography

Autor: Hiroshi Fukuda, Hiroshi Fukuda, Ryoko Yamanaka, Ryoko Yamanaka

Publikováno v: Japanese Journal of Applied Physics; December 1992, Vol. 31 Issue: 12 p4126-4126, 1p

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