Zobrazeno 1 - 10
of 148
pro vyhledávání: '"Hironobu Umemoto"'
Autor:
Masashi Yamamoto, Shiro Nagaoka, Hironobu Umemoto, Keisuke Ohdaira, Takashi Nishiyama, Hideo Horibe
Publikováno v:
International Journal of Polymer Science, Vol 2017 (2017)
We examined an environmentally friendly photoresist removal method using H radicals produced by decomposing hydrogen on a hot iridium catalyst. We examined the relationship between photoresist removal rate and its surface temperature using thin film
Externí odkaz:
https://doaj.org/article/976b8e7a4b064cb1aaf5738f3dfc47b9
Autor:
Masashi Yamamoto, Shota Sogo, Koki Akita, Hideo Horibe, Ryusei Sogame, Shiro Nagaoka, Hironobu Umemoto
Publikováno v:
Journal of Photopolymer Science and Technology. 34:499-504
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c83874cb95a8dc2270445e8c288c3357
https://doi.org/10.2494/photopolymer.34.499
https://doi.org/10.2494/photopolymer.34.499
Publikováno v:
Journal of Photopolymer Science and Technology. 33:433-437
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e10a93f7f2b2a15ede9afa6b6471823b
https://doi.org/10.2494/photopolymer.33.433
https://doi.org/10.2494/photopolymer.33.433
Publikováno v:
Journal of Photopolymer Science and Technology. 33:427-431
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c4ad04a8866b181cf297e9d85b3fd9e
https://doi.org/10.2494/photopolymer.33.427
https://doi.org/10.2494/photopolymer.33.427
Publikováno v:
Entomologia Experimentalis et Applicata. 167(12):977-985
Asexuality is an important tool with regard to the use of parasitoid wasps as biocontrol agents. Asexual (apomictic thelytokous) strains of Meteorus pulchricornis (Wesmael) (Hymenoptera: Braconidae), a polyphagous endoparasitoid of lepidopteran larva
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3e1a4b76185df897a3a0740170b6e7e7
https://hdl.handle.net/20.500.14094/90006628
https://hdl.handle.net/20.500.14094/90006628
Autor:
Shiro Nagaoka, Masashi Yamamoto, Hironobu Umemoto, Tomokazu Shikama, Hideo Horibe, Tomohiro Shiroi
Publikováno v:
Journal of Photopolymer Science and Technology. 32:609-614
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::efc812e56416785612b70bc4acff0406
https://doi.org/10.2494/photopolymer.32.609
https://doi.org/10.2494/photopolymer.32.609
Publikováno v:
Thin Solid Films. 679:22-26
For fabricating semiconductor devices and for microelectromechanical systems, photoresists are important materials supporting photolithography processes. However, photoresists must be removed for subsequent processes. An earlier study demonstrated th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d4b2bba301f6bf24147095c0a3741475
https://doi.org/10.1016/j.tsf.2019.03.035
https://doi.org/10.1016/j.tsf.2019.03.035
Publikováno v:
Thin Solid Films. 635:27-31
Mass spectrometry was used to identify the decomposition products of two typical photoresist polymers, Novolak and polymethylmethacrylate, by H atoms produced on hot wire surfaces. The production of CH4 and CO was confirmed for both polymers. Other p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7442086a6b15fb56a8bbe76087a5b55a
http://hdl.handle.net/10297/00025873
http://hdl.handle.net/10297/00025873
Autor:
Hironobu Umemoto, Atsushi Miyata
Publikováno v:
Thin Solid Films. 635:78-81
Metal wires, such as W, Mo, and Ta, can be boronized to become sinks of B atoms by heating them in the presence of a mixture of H2 and H3NBH3 or (BH)3(NH)3. These boronized wires behave as sources of B atoms when heated in vacuum. The density of B at
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::62c2d37204d3ae7b6c6c329bd6c2d2a6
http://hdl.handle.net/10297/00025872
http://hdl.handle.net/10297/00025872
