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pro vyhledávání: '"Hiromu Onodera"'
Publikováno v:
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D).
Bonding position accuracy of InP/Si direct transfer bonding for heterogeneous integration were investigated. It was revealed that large difference of coordinate misalignment between X and Y directions exists and this may be strongly related to the te
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0cb91495aec78868330c841db5bd335a
https://doi.org/10.1109/ltb-3d53950.2021.9598370
https://doi.org/10.1109/ltb-3d53950.2021.9598370
