Zobrazeno 1 - 1
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pro vyhledávání: '"Hiromori Yamamoto"'
Publikováno v:
Plasma Sources Science and Technology. 20:055002
Electron transport in CF4 under linearly gradient antiparallel magnetic fields was analysed in order to investigate the fundamental properties of magnetic neutral loop discharge plasmas used for material processing. The electron motion was simulated
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e576031eb3d12ac6354b235255c5329c
https://doi.org/10.1088/0963-0252/20/5/055002
https://doi.org/10.1088/0963-0252/20/5/055002
