Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hiroki Urushido"'
Autor:
Masahiro Kato, Satoru Kitagawa, Ryuji Takeda, Kenji Nakashima, Vladimir Akhmetov, Toshiaki Ono, Hiroki Urushido, Kazuo Moriya, Naohisa Inoue, Nobuhito Nango, Kazuhiko Kashima
Publikováno v:
ECS Transactions. 2:471-484
The requirement to standardize measurement methods for BMD (Bulk Micro Defect) density and DZ (Denuded Zone) CZ silicon has lead to the establishment of a SEMI standard for annealed CZ silicon wafers. Therefore, it was decided that we should aim at s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5ab11030a13baea71967bb0c49da8eb
https://doi.org/10.1149/1.2195682
https://doi.org/10.1149/1.2195682
Autor:
Ryuji Takeda, Naohisa Inoue, Kazuo Moriya, Kazuhiko Kashima, Kenji Nakashima, Masahiro Kato, Satoru Kitagawa, Toshiaki Ono, Katsuhiko Nakai, Hiroki Urushido, Nobuhito Nango, Vladimir Akhmetov
Publikováno v:
ECS Meeting Abstracts. :542-542
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd5a719180625c567cba32f24e583142
https://doi.org/10.1149/ma2006-01/12/542
https://doi.org/10.1149/ma2006-01/12/542