Zobrazeno 1 - 10
of 11
pro vyhledávání: '"Hiroki Komatsuzaki"'
Autor:
Hirofumi Saito, Ryutaro Maeda, Hiroki Komatsuzaki, Hiroshi Hiroshima, Yasushiro Nishioka, Ryuta Ikoma, Keigo Kuroda, Kenta Suzuki, S.W. Youn, Takayuki Komori, Yota Kimura
Publikováno v:
Applied Mechanics and Materials. :1360-1363
Flexible micropumps are important components for advanced microfluidic systems. Here, polyimide (PI) for flexible micropumps was focused on. This is because PI has many advantageous properties such as good biocompatibility, high thermal stability, an
Autor:
Hiroki Komatsuzaki, Yasushiro Nishioka, Ryuta Ikoma, Takayuki Komori, Hirofumi Saito, Keigo Kuroda
Publikováno v:
Applied Mechanics and Materials. :1364-1367
Air-actuated valveless micropumps with dual polyimide (PI) diaphragms have been fabricated and characterized. A 5-μm-thick PI membrane was spin-coated on Si wafer, and released by Si ICP etching. The membrane was actuated by alternating air pressure
Autor:
Masahiro Satano, Hirofumi Saito, Tatsuya Kosugi, Keigo Kuroda, Yasushiro Nishioka, Ryuta Ikoma, Takayuki Komori, Hiroki Komatsuzaki
Publikováno v:
Applied Mechanics and Materials. :1368-1371
Transfer printing of Au micro-electrode patterns onto a polyimide (PI) film was investigated, and the optimum transfer conditions were obtained. Here, the line and space patterns with widths of 25 μm and 100 μm were successfully transfered on polyi
Autor:
Hirotaka Maenosono, Yasushiro Nishioka, Ryuta Ikoma, Yudai Fukushi, Syohei Koide, Keigo Kuroda, Hiroki Komatsuzaki, Masahiro Satano, Yohta Kimura, Takayuki Komori, Hirofumi Saito
Publikováno v:
Applied Mechanics and Materials. :1356-1359
Improved fabrication processes of an all-polyimide micro electroosmotic flow pump using hot embossing are described. Microchannels in the micropump were fabricated by hot embossing on a transparent polyimide substrate. A silicon micromachined mold wa
Autor:
Syohei Koide, Masahiro Satano, Yohta Kimura, Hirofumi Saito, Takayuki Komori, Keigo Kuroda, Hiroki Komatsuzaki, Yudai Fukushi, Hirotaka Maenosono, Yasushiro Nishioka, Ryuta Ikoma
Publikováno v:
Key Engineering Materials. 538:125-128
Improved fabrication processes of a micro electroosmotic flow pump using hot embossing are described. The microchannels in the micropump were fabricated by hot embossing on a polymethylmethacrylate (PMMA) substrate. A silicon micromachined mold was p
Autor:
Keigo Kuroda, Hiroshi Hiroshima, Ryutaro Maeda, Masaharu Takahashi, Sung-Won Youn, Hiroki Komatsuzaki, Hirofumi Saitou, Takuyuki Komori, Yasushiro Nishioka, Ryuta Ikoma, Kenta Suzuki
Publikováno v:
ResearcherID
Publikováno v:
Sensors and Actuators A: Physical. 169:259-265
Valveless diffuser/nozzle micropumps with extremely thin polyimide (PI) diaphragms having thicknesses of 2.0 μm and 5.4 μm were fabricated. The micropump chamber had a depth of 530 μm and diameter of 7 mm. The micropumps were operated by deflectin
Publikováno v:
Journal of Photopolymer Science and Technology. 24:293-298
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 130:378-382
A valveless/diffuser micropump with a thin polyimide membrane was designed, fabricated using surface micromachining and characterized. The micropump was actuated by deforming the membrane with alternating air pressure. The micropump chamber had the d
Autor:
Yingwei Liu, Hiroki Komatsuzaki, Kenta Suzuki, Sung-Won Youn, Masaharu Takahashi, Yasushiro Nishioka, Ryuta Ikoma, Tatsuya Kosugi, Ryutaro Maeda
Publikováno v:
Japanese Journal of Applied Physics. 50:06GM09
Micropumps are important components of advanced microfluidic systems. Here, polyimide (PI) as an advantageous structural material for flexible micropumps was focused on. This is because PI has many advantageous properties such as high thermal stabili