Zobrazeno 1 - 10
of 12
pro vyhledávání: '"Hirokazu Niki"'
Publikováno v:
Journal of The Electrochemical Society. 141:3141-3145
A novel positive chemically amplified resist containing partially t-butoxycarbonylmethylated poly(4-hydroxy-styrenes)s and 1,2-naphthoquinone diazide-4-sulfonates (NQ4)s was investigated. The resists are effective for a wide region of UV lights inclu
Autor:
Rumiko Hayase, Yasunobu Onishi, Naohiko Oyasato, Yoshihito Kobayashi, Masataka Miyamura, Hirokazu Niki, Kazuo Sato
Publikováno v:
Journal of Photopolymer Science and Technology. 5:47-54
The dissolution inhibiting properties of partially t-butoxycarbonylmethylated poly(4-vinylphenol) (BOCM-PVP) have been investigated. The dissolution rate of BOCM-PVP in the exposed area increase extremely after post exposure baking. It is found that
Publikováno v:
Journal of Photopolymer Science and Technology. 4:517-526
Novel sensitizers, pyridine N-oxides, were investigated in negative deep-UV resists. Pyridine N-oxide, three isomers of methylpyridine N-oxides and aliphatic N-oxide compound were tested for their bleaching characteristics and resist characteristics
Autor:
Yoshihito Kobayashi, Hirokazu Niki, Osamu Sasaki, Yasunobu Onishi, Naohiko Oyasato, Rumiko Hayase
Publikováno v:
Journal of Photopolymer Science and Technology. 4:337-340
Publikováno v:
Journal of Photopolymer Science and Technology. 3:215-218
Autor:
Masafumi Asano, Yasunobu Onishi, Kazuo Sato, Kenzi Chiba, Hirokazu Niki, Takao Hayashi, Rumiko Hayase
Publikováno v:
SPIE Proceedings.
The resist performance for quarter- and sub-quarter-micron domains using partially t- butoxycarbonylmethylated poly(4-vinylphenol) (BOCM-PVP) as a polymer dissolution inhibitor is reported. This resist contains some additives to improve resolution an
Publikováno v:
Journal of Photopolymer Science and Technology. 6:495-496
Autor:
Murata Kenji, Tamotsu Shirogami, Hirokazu Niki, Tsutomu Takamura, Motoya Kanda, Yuichi Sato, Mitsushi Ueno
Publikováno v:
Journal of Power Sources. 9:147-159
Because of internal shorting due to zinc (Zn) dendrite formation at the Zn electrode, nickel-zinc (NiZn) secondary cell cycle life is somewhat less than the NiCd cell cycle life. To solve this problem, a new kind of separator was developed whic
Publikováno v:
Journal of The Electrochemical Society. 118:1269-1272
The effect of carbonate ions on the anodic behavior of a horizontal zinc anode in concentrated KOH solutions has been investigated by measuring the passivation time at constant current. Anodic dissolution of zinc was found to be associated with the d
Publikováno v:
Japanese Journal of Applied Physics. 26:293
The bleaching characteristics for a contrast enhancement layer (CEL) material were succesfully described by parameters A, B and C; these were used for the modeling of a positive photoresist exposure. As a result, it was clarified that both the A and