Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Hirokazu Hosoda"'
Autor:
Hakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagiga, Georg Soumagne, Fumio Iwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Takashi Saitou
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2021.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::860276926d6d0770d696700e646f8b85
https://doi.org/10.1117/12.2600714
https://doi.org/10.1117/12.2600714
Autor:
Tsuyoshi Yamada, Hiroaki Nakarai, Hirokazu Hosoda, Yukio Watanabe, Takashi Saitou, Nishimura Yuichi, Takashi Suganuma, Yutaka Shiraishi, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Tamotsu Abe, Tatsuya Yanagiga, Gouta Niimi, Fumio Iwamoto, Shinji Nagai, Hiroaki Tomuro, Takayuki Yabu, Hiroshi Tanaka
Publikováno v:
Extreme Ultraviolet Lithography 2020.
Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength lase
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c6793f59fb32351be1dc6550ee73dab
https://doi.org/10.1117/12.2574707
https://doi.org/10.1117/12.2574707