Zobrazeno 1 - 10
of 17
pro vyhledávání: '"Hiroaki TOMURO"'
Autor:
Hiroaki Tomuro, Yoshifumi Ueno, Shinji Nagai, Fumio Iwamoto, Kenichi Miyao, Hideyuki Hayashi, Takuya Ishii, Tamotsu Abe, Hiroaki Nakarai, Takashi Saitou, Hakaru Mizoguchi
Publikováno v:
Optical and EUV Nanolithography XXXVI.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ee1117e78b12b342dd16c9e11657e52
https://doi.org/10.1117/12.2657640
https://doi.org/10.1117/12.2657640
Autor:
Yoshiyuki Honda, Shinji Nagai, Masayuki Morita, Masahiko Andou, Hiroaki Tomuro, Akifumi Matsuda, Mamoru Yoshimoto
Publikováno v:
SSRN Electronic Journal.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2a7cd283e41238c1c8f2d78888b9cb9f
https://doi.org/10.2139/ssrn.4080983
https://doi.org/10.2139/ssrn.4080983
Autor:
Hakaru Mizoguchi, Hiroaki Tomuro, Yuichi Nishimura, Hirokazu Hosoda, Hiroaki Nakarai, Tamotsu Abe, Hiroshi Tanaka, Yukio Watanabe, Yutaka Shiraishi, Tatsuya Yanagiga, Georg Soumagne, Fumio Iwamoto, Shinji Nagai, Yoshifumi Ueno, Takashi Suganuma, Gouta Niimi, Takayuki Yabu, Tsuyoshi Yamada, Takashi Saitou
Publikováno v:
International Conference on Extreme Ultraviolet Lithography 2021.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::860276926d6d0770d696700e646f8b85
https://doi.org/10.1117/12.2600714
https://doi.org/10.1117/12.2600714
Autor:
Kouichiro Kouge, Kentaro Tomita, Junya Hotta, Yiming Pan, Hiroaki Tomuro, Tatsuya Yanagida, Kiichiro Uchino, Naoji Yamamoto
Publikováno v:
Japanese Journal of Applied Physics. 61:056001
Temporal evolutions of electron temperature ( T e ) and electron density ( n e ) of photoionized hydrogen plasmas, which were induced by radiation from laser-produced Sn-plasma EUV sources, were measured using the laser Thomson scattering technique.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9be157dcbaef6e3fb3b84ad939cf9385
https://doi.org/10.35848/1347-4065/ac5d25
https://doi.org/10.35848/1347-4065/ac5d25
Autor:
Mamoru Yoshimoto, Yutaka Shiraishi, Masahiko Andou, Yoshiyuki Honda, Akifumi Matsuda, Masayuki Morita, Hiroaki Tomuro, Tatsuya Yanagida
Publikováno v:
Applied Physics Express. 13(Number 11)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::347bcf5bb29b00fb99b11cb3921decb8
http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100833489
http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100833489
Autor:
Tsuyoshi Yamada, Hiroaki Nakarai, Hirokazu Hosoda, Yukio Watanabe, Takashi Saitou, Nishimura Yuichi, Takashi Suganuma, Yutaka Shiraishi, Hakaru Mizoguchi, Yoshifumi Ueno, Georg Soumagne, Tamotsu Abe, Tatsuya Yanagiga, Gouta Niimi, Fumio Iwamoto, Shinji Nagai, Hiroaki Tomuro, Takayuki Yabu, Hiroshi Tanaka
Publikováno v:
Extreme Ultraviolet Lithography 2020.
Gigaphoton develops CO2-Sn-LPP EUV light source which is the most promising solution as the 13.5nm high power light source for HVM EUVL. Unique and original technologies including; combination of pulsed CO2 laser and Sn droplets, dual wavelength lase
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4c6793f59fb32351be1dc6550ee73dab
https://doi.org/10.1117/12.2574707
https://doi.org/10.1117/12.2574707
Autor:
Hiroaki TOMURO, Mengran JI, Ryo NAGATA, Koichiro KOUGE, Tatsuya YANAGIDA, Masayuki MORITA, Masahiko ANDOU, Yoshiyuki HONDA, Kiichiro UCHINO, Tsuyoshi YOSHITAKE
Publikováno v:
Plasma and Fusion Research. 17:1406005-1406005
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e8f68157d8be300922a4b07a3056cb16
https://doi.org/10.1585/pfr.17.1406005
https://doi.org/10.1585/pfr.17.1406005
Autor:
Kentaro Tomita, Kouichiro Kouge, Naoji Yamamoto, Hiroaki Tomuro, Kiichiro Uchino, Tatsuya Yanagida, Yiming Pan, Masayuki Morita, Junya Hotta
Publikováno v:
Japanese Journal of Applied Physics. 60:066002
We observed the spatial and temporal changes of the electron density (n e) and the electron temperature (T e) of hydrogen plasmas around a laser-produced Sn plasma EUV source. The plasma parameters were measured by the laser Thomson scattering (LTS)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::330892d37bdcc4aee36b08162db04769
https://doi.org/10.35848/1347-4065/abfadc
https://doi.org/10.35848/1347-4065/abfadc
Autor:
Syouichi Tsukiyama, Kouichiro Kouge, Tatsuya Yanagida, Kiichiro Uchino, Hakaru Mizoguchi, Katsunobu Nishihara, Yasunori Wada, Hiroaki Tomuro, Toshiaki Eguchi, Atsushi Sunahara, Takeshi Kodama, Georg Soumagne, Yuta Sato, Masahito Kunishima, Kentaro Tomita
Publikováno v:
Scientific Reports
Scientific Reports, Vol 7, Iss 1, Pp 1-7 (2017)
Scientific Reports, Vol 7, Iss 1, Pp 1-7 (2017)
Time-resolved two-dimensional (2D) profiles of electron density (ne) and electron temperature (Te) of extreme ultraviolet (EUV) lithography light source plasmas were obtained from the ion components of collective Thomson scattering (CTS) spectra. The
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fdd706e58d47172ec530ab67acd3fc40
https://doi.org/10.1038/s41598-017-11685-0
https://doi.org/10.1038/s41598-017-11685-0
Autor:
Tatsuya Yanagida, Toshiaki Eguchi, Hakaru Mizoguchi, Takeshi Kodama, Syoichi Tsukiyama, Hiroaki Tomuro, Yasunori Wada, Kouichiro Kouge, Kiichiro Uchino, Kentaro Tomita, Yuta Sato, Masahito Kunishima
Publikováno v:
Japanese Journal of Applied Physics. 56:036201
Spatial profiles of the electron density (n e), electron temperature (T e), and average ionic charge (Z) of laser-produced Sn plasmas for EUV lithography, whose conversion efficiency (CE) is sufficiently high for practical use, were measured using a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44b05a0e4c44536c7ef06d64774fac3c
https://doi.org/10.7567/jjap.56.036201
https://doi.org/10.7567/jjap.56.036201