Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Hiroaki Fujishima"'
Autor:
Nobuyuki Kanezaki, Mitsuhiro Sano, Satoshi Takahashi, Naoki Yamamoto, Hikaru Endo, Kazuya Taniguchi, Shigeki Yoshida, Yoshio Takeuchi, Yukio Agatsuma, Tatsuhiko Isogai, Chikara Ikemori, Kazuhiko Nakajima, Hiroki Kanahama, Hiroaki Fujishima, Takashi Matsubara, Hisaeki Imai
Publikováno v:
Journal of Applied Phycology. 26:1845-1852
Apart from certain studies on Macrocystis pyrifera (Linnaeus) C. Agardh, very few in situ experimental studies on production have been carried out to verify that “bottom–up effects” (relating to nutrient supply) are more important than “top
Publikováno v:
Advances in Resist Technology and Processing XX.
Cyclopolymerization methodology is unique because it uses a standard free radical polymerization that is free from the use of metal catalyzed chemistry while it still can provide the main chain cyclic structure. The feasibility and applicability have
Autor:
Hiroaki Fujishima, Yasunori Uetani
Publikováno v:
Advances in Resist Technology and Processing XVII.
Using 2MAdMA(2-Metyl-2-Adamantylmethacrylate), 2MAdAA(2-Metyl- 2-Adamantylacrylate), GBLMA((gamma) -butyrolactone methacrylate), GBLAA((gamma) -butyrolactone acrylate) monomers, 4 types of copolymers, 2MAdMA/GBLMA, 2MAdMA/GBLAA, 2MAdAA/GBLMA, 2MAdAA/
Publikováno v:
SPIE Proceedings.
We compared 2MAdMA(2-Metyl-2- Adamantylmethacrylate)/GBLMA((gamma) -butyrolactone methacrylate) resin system and 2EAdMA(2-Etyl-2- Adamantylmethacrylate)/GBLMA resin system. 2EAdMA/GBLMA resin system showed higher sensitivity, dissolution contrast and
Publikováno v:
The Proceedings of Ibaraki District Conference. 2007:123-124
Publikováno v:
SPIE Proceedings.
Alicyclic groups are preferable resin components of ArF resists due to better dry-etching resistance and higher transparency at 193 nm. On the other hand, Alicyclic groups bring poor adhesion of ArF resists during wet development, because of their hi
Publikováno v:
The Proceedings of Ibaraki District Conference. 2006:131-132
Conference
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Conference
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