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of 2
pro vyhledávání: '"Hiro Kinoshita"'
Autor:
J. Wiseman, C. Gabriel, Shengnian Song, Amol Ramesh Joshi, Hiro Kinoshita, N. Yazdani, Kuo-Tung Chang, C. Foster, S. Brown, B. Banerjee
Publikováno v:
2007 International Symposium on Semiconductor Manufacturing.
In this presentation, we describe the process integration of a robust Contact One module in a high density floating gate device. Comprehensive process window studies using critical dimension as the control parameter identified the main process limite
Autor:
Kuo-Tung Chang, Amol Ramesh Joshi, Kelwin Ko, Makoto Takahashi, Yu Sun, Marina V. Plat, Siu Ho, Arjun Rangarajan, Shenqing Fang, Kazuhiro Mizutani, Wing Leung, John Wang, Hiroyuki Ogawa, Ming Kwan, Sung-Chul Lee, Hiro Kinoshita, Sheung-Hee Park, Joerg Reiss
Publikováno v:
Scopus-Elsevier
In floating gate (FG) NOR flash memory arrays, word lines (WL) bend at Vss columns to accommodate the Vss contacts. As the memory cell is scaled down, patterning of the WL bending becomes more and more challenging. Furthermore, to ensure that the WL
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e033590ea776e280bb67ed5b1ea69672
http://www.scopus.com/inward/record.url?eid=2-s2.0-46849095127&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-46849095127&partnerID=MN8TOARS