Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Hiraku Chakihara"'
Autor:
Masao Inoue, Hiraku Chakihara, Yuki Ota, Shuji Matsuo, Kentaro Saito, Takuya Hagiwara, Masazumi Matsuura, Seiji Muranaka
Publikováno v:
Journal of Photopolymer Science and Technology. 28:17-24
Autor:
Hiraku Chakihara, Kazuo Nakazato, Y. Nakatsuka, Hideyuki Matsuoka, S. Moriya, Akio Nishida, Masahiro Moniwa, Masamichi Matsuoka, Toshiyuki Kikuchi
Publikováno v:
IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004..
A new vertically stacked poly-Si MOSFET has been studied as a novel technique that enables device integration without applying advanced node process. Reduced cell area size of 1.21 /spl mu/m/sup 2/ has been achieved in 6T-SRAM which is 60% of 130 nm
Autor:
Masahiro Moniwa, A. Fujimoto, Masamichi Matsuoka, Kazuo Nakazato, Yasuhiko Takahashi, Hiraku Chakihara, Hideyuki Matsuoka, K. Okuyama, Toshiyuki Mine
Publikováno v:
Digest of Technical Papers. 2004 Symposium on VLSI Technology, 2004..
Vertical transistors take up less area than conventional planar CMOS devices and are thus promising as a means for increased densities of integration. Most of the vertical MOSFET structures proposed so far, however, require sophisticated processing w