Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Hilmar Korth"'
Publikováno v:
SPIE Proceedings.
New MEMS device are perpetually being proposed and concepts are approved by means of demonstrator devices. Volume production of MEMS however requires more. The fabrication process must be suitable for large numbers of wafers at acceptable cost and yi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::437abae2f8a6b7b094e813c59c848eb0
https://doi.org/10.1117/12.545247
https://doi.org/10.1117/12.545247
