Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Hild, Kerstin"'
The invention relates to a mirror for a microlithographic projection exposure system, and to a method for operating a deformable mirror. According to one aspect of the invention, a mirror has an active optical area (11), a mirror substrate (12), a re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::7572b27658618483bd26dc093ce6c103
https://research.utwente.nl/en/publications/mirror-for-a-microlithographic-projection-exposure-system-and-method-for-operating-a-deformable-mirror(66612b3a-06f1-407a-a5a2-f6037106d4a5).html
https://research.utwente.nl/en/publications/mirror-for-a-microlithographic-projection-exposure-system-and-method-for-operating-a-deformable-mirror(66612b3a-06f1-407a-a5a2-f6037106d4a5).html
Autor:
Wylie-Van Eerd, Ben, Bijkerk, Frederik, Hild, Kerstin, Gruner, Toralf, Schulte, Stefan, Weyler, Simone
The invention relates to a mirror, in particular for a microlithographic projection exposure system, comprising a mirror substrate (12, 32, 52), which mirror has a reflection layer stack (21, 41, 61) for reflecting electromagnetic radiation of a work
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::95ec440382821a0267745f7edbc77893
https://research.utwente.nl/en/publications/mirror-in-particular-for-a-microlithographic-projection-exposure-system(132ca499-e4ff-491c-9414-5f81fb7e9dfc).html
https://research.utwente.nl/en/publications/mirror-in-particular-for-a-microlithographic-projection-exposure-system(132ca499-e4ff-491c-9414-5f81fb7e9dfc).html
Autor:
Pollak, Thilo, Finken, Reimar, Hild, Kerstin, Wylie- Van Eerd, Benjamin, Jurgens, Dirk, Spengler, Diana
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::a2f6971a5b8eed90d3387f4503ee58b1
https://research.utwente.nl/en/publications/adaptive-mirrors--upcoming-powerful-technologies-for-wavefront-correction(2b4b4a34-c734-4b7a-9c47-7d13cda0182e).html
https://research.utwente.nl/en/publications/adaptive-mirrors--upcoming-powerful-technologies-for-wavefront-correction(2b4b4a34-c734-4b7a-9c47-7d13cda0182e).html
Autor:
Elmers, Hans-Joachim, Conca, Andres, Eichhorn, Tobias, Gloskovs ii, Andrei, Hild, Kerstin, Jakob, Gerhard, Jourdan, Martin, Kallmayer, Michael
Publikováno v:
Advances in Solid State Physics (978-3-540-85858-4); 2009, p171-182, 12p
Autor:
Putkonen, Per, Nilsson, Charlotta, Hild, Kerstin, Benthin, Reinhold, Cranage, Martin, Aubertin, Anne Marie, Biberfeld, Gunnel
Publikováno v:
Journal of Medical Primatology; February 1993, Vol. 22 Issue: 2-3 p100-103, 4p